IEEE Trans. Semicond. Manufact.
 1990
DOI: 10.1109/66.53189
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Integrating CAM and process simulation to enhance on-line analysis and control of IC fabrication

A. J. MacDonald
1
,
A.J. Walton
2
,
John M. Robertson
3
et al.
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Cited by 5 publications
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Semiconductor Process Representation

Troxel
1
,
Boning
2
,
McIlrath
3
1999
Wiley Encyclopedia of Electrical and Electronics Engineering
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0
0
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Semiconductor Process Representation

Troxel
1
,
Boning
2
,
McIlrath
3
1999
Wiley Encyclopedia of Electrical and Electronics Engineering
0
0
0
0
View full textAdd to dashboardCite
show abstract

A system for semiconductor process specification

Durbeck
1
,
Chern
2
,
Boning
3
1993
IEEE Trans. Semicond. Manufact.
12
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1
0
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Research on NC Simulation Technology Integrating CAD/CAM/CAPP

Qiu1
2014
2014 7th International Conference on Intelligent Computation Technology and Automation
2
0
0
0
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