2002
DOI: 10.1147/rd.462.0245
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Interconnect opportunities for gigascale integration

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Cited by 160 publications
(71 citation statements)
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“…Three-dimensional integrated circuit (3D IC) technology has recently attracted considerable interest as a "More-than-Moore" solution [1,2]. The through silicon via (TSV) is a key component of 3D ICs; it offers decreased latency, decreased energy-per-bit, and increased bandwidth density [3][4][5].…”
Section: Introductionmentioning
confidence: 99%
“…Three-dimensional integrated circuit (3D IC) technology has recently attracted considerable interest as a "More-than-Moore" solution [1,2]. The through silicon via (TSV) is a key component of 3D ICs; it offers decreased latency, decreased energy-per-bit, and increased bandwidth density [3][4][5].…”
Section: Introductionmentioning
confidence: 99%
“…But delay associated with interconnects are becoming increasingly important with advancement of technology levels. This is because in deep submicron technologies, interconnect can no longer be seen as simple resistor but the associated parasitic such as capacitance and inductance also need to be considered [1]. This increasing interconnects delay leads the researchers to find an alternative material for future global VLSI interconnects.…”
Section: Introductionmentioning
confidence: 99%
“…Interconnects are now a key factor determining overall IC performance [2] and are analogously affected, through line edge roughness (LER). The causes of LER are well understood, arising T.D.…”
Section: Introductionmentioning
confidence: 99%