Interpretation of scanning capacitance microscopy for thin oxides characterization

Ligor, O.; Gautier, Brice; Descamps‐Mandine, Armel; Albertini, David F.; Baboux, Nicolas; Militaru, L.

doi:10.1016/j.tsf.2009.05.026

Cited by 6 publications

(2 citation statements)

References 16 publications

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“…Other related probe techniques include electrochemical AFM (EC-AFM) [38], electrostatic force microscopy (EFM) [39], kelvin probe force microscopy (KPFM) [40], photoconductive AFM (pcAFM) [41], scanning capacitance microscopy (SCM) [42], surface potential microscopy (SPoM) [43], scanning spreading resistance microscopy (SSRM) [44] and scanning thermal microscopy (SThM) [45].…”

Section: Fundamentalsmentioning

confidence: 99%

Characterization of drug delivery vehicles using atomic force microscopy: current status

Smith

Olusanya

Lamprou

2018

Expert Opinion on Drug Delivery

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Introduction: The field of nanomedicine, utilising nano-sized vehicles (nanoparticles and nanofibres) for targeted local drug delivery, has a promising future. This is dependent on the ability to analyse the chemical and physical properties of these drug carriers at the nanoscale and hence atomic force microscopy (AFM), a high-resolution imaging and local force-measurement technique, is ideally suited. Areas covered: Following a brief introduction to the technique, the review describes how AFM has been used in selected publications from 2015-2018 to characterise nanoparticles and nanofibers as drug delivery vehicles. These sections are ordered into areas of increasing AFM complexity: imaging/particle sizing, surface roughness/quantitative analysis of images and analysis of force curves (to extract nanoindentation and adhesion data). Expert opinion: AFM imaging/sizing is used extensively for the characterisation of nanoparticle and nanofibre drug delivery vehicles, with surface roughness and nanomechanical/adhesion data acquisition being less common. The field is progressing into combining AFM with other techniques, notably SEM, ToF-SIMS, Raman, Confocal and UV. Current limitations include a 50 nm resolution limit of nanoparticles imaged within live cells and AFM tip-induced activation of cytoskeleton proteins. Following drug release real-time with AFM-spectroscopic techniques and studying drug interactions on cell receptors appear to be on the horizon.

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Section: Fundamentalsmentioning

confidence: 99%

Characterization of drug delivery vehicles using atomic force microscopy: current status

Smith

Olusanya

Lamprou

2018

Expert Opinion on Drug Delivery

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“…This method has also been extensively used in the evaluation and characterization of thin films for sensing and other applications, such as tin oxide gas sensing structures [9], gas-sensitive coatings [10], TiO 2 nanoparticle thin film gas sensors [11], demonstration of resistive switching in TiO 2 [12] and NiO [13] thin films, dielectric relaxation and conduction in SrBi 2 Ta 2 O 9 thin films [14], electrical characterization of carbon nanotube networks [15] and polymer nanocomposites [16] and many others. In recent years, the dielectric spectroscopy method has been extended to the nanometer scale range since accurate high spatial resolution measurements of dielectric properties are of great interest [17,18]. One of the techniques for such measurements is nanoscale capacitance microscopy (NCM) [19][20][21].…”

Section: Introductionmentioning

confidence: 99%

Role of geometric parameters in electrical measurements of insulating thin films deposited on a conductive substrate

Kumar¹,

Gerhardt²

2012

Meas. Sci. Technol.

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The effects of film thickness, electrode size and substrate thickness on the impedance parameters of alternating frequency dielectric measurements of insulating thin films deposited on conductive substrates were studied through parametric finite-element simulations. The quasi-static forms of Maxwell's electromagnetic equations in a time harmonic mode were solved using COMSOL Multiphysics® for several types of 2D models (linear and axisymmetric). The full 2D model deals with a configuration in which the impedance is measured between two surface electrodes on top of a film deposited on a conductive substrate. For the simplified 2D models, the conductive substrate is ignored and the two electrodes are placed on the top and bottom of the film. By comparing the full model and the simplified models, approximations and generalizations are deduced. For highly insulating films, such as the case of insulating SiO2 films on a conducting Si substrate, even the simplified models predict accurate capacitance values at all frequencies. However, the edge effects on the capacitance are found to be significant when the film thickness increases and/or the top electrode contact size decreases. The thickness of the substrate affects predominantly the resistive components of the dielectric response while having no significant effect on the capacitive components. Changing the electrode contact size or the film thickness determines the specific values of the measured resistance or capacitance while the material time constant remains the same, and thus this affects the frequency dependence that is able to be detected. This work highlights the importance of keeping in mind the film thickness and electrode contact size for the correct interpretation of the measured dielectric properties of micro/nanoscale structures that are often investigated using nanoscale capacitance measurements.

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Evolution of potential distributions during the charging of nano-structured metal oxide films in air as response to sudden voltage application

Kiselev¹,

Sommer²

2010

Thin Solid Films

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Interpretation of scanning capacitance microscopy for thin oxides characterization

Cited by 6 publications

References 16 publications

Characterization of drug delivery vehicles using atomic force microscopy: current status

Characterization of drug delivery vehicles using atomic force microscopy: current status

Role of geometric parameters in electrical measurements of insulating thin films deposited on a conductive substrate

Evolution of potential distributions during the charging of nano-structured metal oxide films in air as response to sudden voltage application

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