Laser-induced graphitized periodic surface structure formed on tetrahedral amorphous carbon films

Yasumaru, Naoki; Sentoku, Eisuke; Toya, T.; Tominaga, Ryoya; Harigai, Toru; Takikawa, Hirofumi; Tanimoto, Tsuyoshi

doi:10.1016/j.diamond.2020.107909

Cited by 12 publications

(12 citation statements)

References 42 publications

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“…The presence of such a 'glassy carbon' layer makes a dielectric DLC film a two-layer GC/DLC coating with a top conductive layer having identical optical properties and controlling the interference between surface plasmons and incident light. This can qualitatively explain similar 'LIPSS period-on-fluence' dependences observed for hydrogenated DLC (a-C:H) films, hydrogen-free tetrahedral amorphous carbon (ta-C) films, and GC plates [10]. For interpretation of experimentally observed LIPSS periods, the calculations of SPP periods at the air/GC and GC/DLC interfaces were reported [4,18], in which an influence of the thickness of a laser-excited GC layer on the properties of SPPs in such a three-layer system (air/GC layer/DLC) was not considered.…”

Section: Introductionsupporting

confidence: 69%

“…Femtosecond laser-induced periodic surface structures (LIPSS), brightly called a scientific evergreen [1], remain to be of undiminishing interest with regard to both the LIPSS formation mechanisms and various applications of laser-structured surfaces [2][3][4][5][6][7][8][9][10][11][12]. For diamond-like carbon (DLC) films, femtosecond (fs) laser ablation and LIPSS formation are preceded by a structural transformation (graphitization) in a thin surface layer [13][14][15][16][17].…”

Section: Introductionmentioning

confidence: 99%

“…For diamond-like carbon (DLC) films, femtosecond (fs) laser ablation and LIPSS formation are preceded by a structural transformation (graphitization) in a thin surface layer [13][14][15][16][17]. The surface graphitization changes surface properties and affects the ablation process and periodic surface nanostructuring during multipulse irradiation [3,10,[15][16][17]. Generally, the fs-LIPSS formation on DLC films is attributed to the excitation of surface plasmon polaritons (SPPs) in the graphitized layer, responsible for the periodic enhancement of local laser fields and spatial modulation of ablation rates on the film surface [4,7].…”

Section: Introductionmentioning

confidence: 99%

“…Generally, the fs-LIPSS formation on DLC films is attributed to the excitation of surface plasmon polaritons (SPPs) in the graphitized layer, responsible for the periodic enhancement of local laser fields and spatial modulation of ablation rates on the film surface [4,7]. The structure of the graphitized DLC surface, where LIPSS are produced, is that of glassy carbon (GC), according to Raman spectroscopy studies [3,10,15]. The surface relief analysis of the laser-irradiated swelled regions gives an estimation of a few hundred nanometers for the graphitized layer thickness [10,13,16].…”

Section: Introductionmentioning

confidence: 99%

“…The structure of the graphitized DLC surface, where LIPSS are produced, is that of glassy carbon (GC), according to Raman spectroscopy studies [3,10,15]. The surface relief analysis of the laser-irradiated swelled regions gives an estimation of a few hundred nanometers for the graphitized layer thickness [10,13,16]. The presence of such a 'glassy carbon' layer makes a dielectric DLC film a two-layer GC/DLC coating with a top conductive layer having identical optical properties and controlling the interference between surface plasmons and incident light.…”

Section: Introductionmentioning

confidence: 99%

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Sub-Threshold Fabrication of Laser-Induced Periodic Surface Structures on Diamond-like Nanocomposite Films with IR Femtosecond Pulses

et al. 2022

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In the paper, we study the formation of laser-induced periodic surface structures (LIPSS) on diamond-like nanocomposite (DLN) a-C:H:Si:O films during nanoscale ablation processing at low fluences – below the single-pulse graphitization and spallation thresholds—using an IR fs-laser (wavelength 1030 nm, pulse duration 320 fs, pulse repetition rate 100 kHz, scanning beam velocity 0.04–0.08 m/s). The studies are focused on microscopic analysis of the nanostructured DLN film surface at different stages of LIPSS formation and numerical modeling of surface plasmon polaritons in a thin graphitized surface layer. Important findings are concerned with (i) sub-threshold fabrication of high spatial frequency LIPSS (HSFL) and low spatial frequency LIPSS (LSFL) under negligible surface graphitization of hard DLN films, (ii) transition from the HSFL (periods of 140 ± 30 and 230 ± 40 nm) to LSFL (period of 830–900 nm) within a narrow fluence range of 0.21–0.32 J/cm2, (iii) visualization of equi-field lines by ablated nanoparticles at an initial stage of the LIPSS formation, providing proof of larger electric fields in the valleys and weaker fields at the ridges of a growing surface grating, (iv) influence of the thickness of a laser-excited glassy carbon (GC) layer on the period of surface plasmon polaritons excited in a three-layer system “air/GC layer/DLN film.”

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Section: Introductionsupporting

confidence: 69%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Sub-Threshold Fabrication of Laser-Induced Periodic Surface Structures on Diamond-like Nanocomposite Films with IR Femtosecond Pulses

et al. 2022

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Morphology and structure of diamond-like carbon film induced by picosecond laser ablation

Takabayashi

Takahashi²,

Tsuchiya³

et al. 2022

Appl. Phys. A

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A multi-method study of femtosecond laser modification and ablation of amorphous hydrogenated carbon coatings

Hirahara,

Bonse,

Krüger

et al. 2024

Appl. Phys. A

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We present a study on femtosecond laser treatment of amorphous hydrogen-containing carbon coatings (a-C:H). The coatings were deposited on silicon wafers by a plasma-assisted chemical vapour deposition (PA-CVD), resulting in two different types of material with distinct properties (referred to as “absorbing” and “semi-transparent” coatings in the following). The samples were laser-treated with single fs-laser pulses (800 nm center wavelength, 35 fs pulse duration) in the ablative regime. Through a multi-method approach using topometry, Raman spectroscopy, and spectroscopic imaging ellipsometry, we can identify zones and thresholds of different fluence dependent effects and have access to the local dielectric function. The two coating materials react significantly different upon laser treatment. We determined the (non-ablative) modification threshold fluence for the absorbing coating as $$3.6\times {10}^{-2}$$ 3.6 × 10 - 2 Jcm−2 and its ablation threshold as 0.22 Jcm−2. The semi-transparent coating does not show such a low-fluence modification but exhibits a characteristic interference-based intra-film ablation mechanism with two distinguishable ablation thresholds at 0.25 and 0.28 Jcm−2, respectively. The combination of tailored layer materials and correlative imaging spectroscopic methods delivers new insights into the behaviour of materials when treated with ultrashort-pulse laser radiation. Graphical abstract

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Laser-induced graphitized periodic surface structure formed on tetrahedral amorphous carbon films

Cited by 12 publications

References 42 publications

Sub-Threshold Fabrication of Laser-Induced Periodic Surface Structures on Diamond-like Nanocomposite Films with IR Femtosecond Pulses

Sub-Threshold Fabrication of Laser-Induced Periodic Surface Structures on Diamond-like Nanocomposite Films with IR Femtosecond Pulses

Morphology and structure of diamond-like carbon film induced by picosecond laser ablation

A multi-method study of femtosecond laser modification and ablation of amorphous hydrogenated carbon coatings

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