1983
DOI: 10.1016/0167-5087(83)91005-0
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Liquid metal ion sources: Mechanism and applications

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Cited by 108 publications
(54 citation statements)
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“…The high currents of atomic ions generated by liquid metal ion sources are explained by an ion evaporation mechanism (15). In a liquid metal ion source, a high voltage is applied to a liquid metal in a nozzle until a Taylor Cone forms.…”
Section: Figmentioning
confidence: 99%
“…The high currents of atomic ions generated by liquid metal ion sources are explained by an ion evaporation mechanism (15). In a liquid metal ion source, a high voltage is applied to a liquid metal in a nozzle until a Taylor Cone forms.…”
Section: Figmentioning
confidence: 99%
“…[2][3][4] In the 1980s, FIB instruments were embraced by the semiconductor industry as offline equipment for mask or circuit repair. It was not until the 1990s that FIB instruments began to be used in research laboratories, and today there are commercial instruments available from multiple manufacturers.…”
Section: Introductionmentioning
confidence: 99%
“…Field-ion energy-deficit measurements [23] allow us to put an upper limit on fhe voltage drop; I estimate this as not move than 2 V, probably less. Hence we obtain R 4 0.09 .…”
Section: Alternative Explanations For Electrically Driven Jetsmentioning
confidence: 99%