Lithographically defined nano and micro sensors using “float coating” of resist and electron beam lithography

Abstract

Fabrication of quasi-three-dimensional micro/nanomechanical components using electron beam cross-linked poly (methyl methacrylate) resist J.Novel scanning near-field optical microscopy/atomic force microscope probes by combined micromachining and electron-beam nanolithographyThe combination of direct-write electron beam lithography and bulk silicon micromachining is shown to give great flexibility in the definition of nanosensors. The technique is based on a novel method for coating the specimen with electron beam resist allowing high resolution features to be defined on the top of micromachined asperities or in 200 m deep etched holes. Examples of sensors fabricated using this method include advanced magnetic nanosensors such as Hall probe sensors, electromagnetic coils or combined coils and Hall probes. Near-field optical atomic force microscope probes are demonstrated with reproducible aperture size down to 20ϫ35 nm. Near-field optical probes using a shaped aperture to allow the passage of linearly polarized light are shown to offer optical throughputs up to 2% with modest collection optics. The use of a near-field optical probe having a crossed slit form is demonstrated to give high throughput and resolution in two dimensions for the imaging of fluorescent objects. Near-field optical probes with multiple apertures of closely matched size are demonstrated.

On-tip sub-micrometer Hall probes for magnetic microscopy prepared by AFM lithography

“…Conformal resist deposition on non-planar substrates can be achieved by spraying [11], electro-deposition [12,13], plasma deposition, etc. We opted for a simple ''float-coating'' technique first demonstrated by Zhou et al [14]. The authors coated non-planar substrates with polymethyl methacrylate to realize nano-scale bismuth Hall probes, magnetic coils and thermocouple junctions on AFM tip apexes [14,15].…”

“…We opted for a simple ''float-coating'' technique first demonstrated by Zhou et al [14]. The authors coated non-planar substrates with polymethyl methacrylate to realize nano-scale bismuth Hall probes, magnetic coils and thermocouple junctions on AFM tip apexes [14,15]. The essence of ''float-coating'' nonplanar photolithography lies in the deposition of resist layers from the water surface.…”

Study of Magnetic Micro-Ellipses by Cantilever Sensor

“…Nevertheless, these are mostly laborious processes and require special equipment. Alternatively, resist deposition from a water surface (float coating) [7] is simple, but favorable only for optical resists and the results are not sufficiently reproducible for EB resists.…”

Dispersive one-dimensional (Mo/Si) nanocrystals for single molecular detection systems using x rays

“…[12][13][14] However, it is difficult to fabricate nanometer-scale structures over macroscopic areas (ϳcm 2 ) at a time. We investigated the following lithograph techniques: we considered colloidal beads ͑e.g., gold, polystyrene, silicon dioxide͒ as resist materials for protecting the Mo/Si multilayer from RIE ions.…”