Lossless high-speed data compression for optical interconnects as used in maskless lithography systems

On-Demand Data Pumping for Digital Micromirror Device in Maskless Lithography Systems

“…In DMD based maskless photolithography system, the micromirror array works as a virtual photomask to write patterns directly onto glass substrates at high speed with low cost [2,[8][9]. However, the task providing huge data for DMD frame of the photolithographic pattern is essential and crucial, even though it is not easy to synchronize between sequence of patterns and irradiation rate off micromirrors.…”