“…Recently, epitaxy-grown power HEMT's, including 3.5-V-operation conventional AlGaAs/InGaAs HEMT's (PAE 34.2%) [2] and 3-V-operation GaAs/InGaAs HEMT's (PAE 53%) [3], exhibited good performance for PHS applications. However, the epitaxial devices have the disadvantages of complicated epitaxy structure, difficult uniformity control, and high wafer costs, which cause negative impact on manufacturing yields and production costs.…”