<title>Design and performance of a high-force piezoelectric inchworm motor</title>

Abstract

A linear inchworm motor was developed for applications in adaptive, conformable structures for flow control. The device is compact (82 x 57 x 13 mm). and capable of unlimited displacement and high force actuation (150 N). The static holding three is 350 N. Four piezoceramic stack elements (two for clamping and two for extension) are integrated into the actuator.\khich is cut from a single block of titanium alloy Actuation is in the form of a steel shaft pushed through a precision tolerance hole in the device. Unlimited displacements are achieved by repetitively advancing and clamping the steel shaft. Although each step is only on the order of 10 microns. a step rate of 100 Hz results in a speed of 1 mm's. Since the input voltage can readily control the step size, positioning on the sub-micron level is possible. Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/12/2015 Terms of Use: http://spiedl.org/terms 722 70 80 90 Clamp, Pusher Voltage (V) Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/12/2015 Terms of Use: http://spiedl.org/terms

A precision robot system with modular actuators and MEMS micro gripper for micro system assembly

“…The basic operation principle of the inchworm actuator is described in [6]. The speed of an actuator determines the productivity, so the inchworm type actuators have been improved [7][8][9][10]. We adopt an inchworm style actuator as a prismatic actuator and propose an inchworm type actuator as shown in Fig.…”

Study on precision piezoelectric rotary step motors with inner anchor/loosen and outer drive

“…The machine with four thin shelf flexible hinges can transform the linear movement of the PZT ceramics into rotary movement. High precision rotary step movement is achieved through anchor/loosening and driving, which is called bionic movement [10,11]. The motion structure sheds light on research on the precision PZT rotary step motor.…”

Novel precision piezoelectric step rotary actuator

“…In recent years, micro/nanometer drive technology and its correlation domain, which is the core of ultra precise operation technology, have become hot spots [1,2]. The displacement and the movement precision that are driven by the piezoelectricity may reach micron levels.…”