1996
DOI: 10.1117/12.246793
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<title>Diamond turning of silicon optics</title>

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Cited by 9 publications
(6 citation statements)
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“…Nanometrically-smooth infrared silicon optics can be manufactured by the diamond turning process [1] [2]. Due to its relatively low mass density, single crystal silicon is an ideal optical material for weight sensitive infrared (IR) applications.…”
Section: Introductionmentioning
confidence: 99%
“…Nanometrically-smooth infrared silicon optics can be manufactured by the diamond turning process [1] [2]. Due to its relatively low mass density, single crystal silicon is an ideal optical material for weight sensitive infrared (IR) applications.…”
Section: Introductionmentioning
confidence: 99%
“…Important research into the diamond machining of hard and brittle materials such as silicon and germanium was undertaken by many [30][31][32][33]. Collectively, their work established today's production methods for the fabrication of infrared (IR) optics as applied in missile guidance systems, heat-seeking detection cameras and night vision sights [34]. Materials ostensibly considered brittle, such as silicon, can today readily be turned without brittle fracture owing to the quality of control of the cut chip thickness using high-quality lathes.…”
Section: (A) Single-point Diamond Machiningmentioning
confidence: 99%
“…The silicon blocks are polished smoothly to be applicable as optical surfaces [3][4][5][6][7][8][9][10], which in turn are cut by wire electrical discharge machining (WEDM) to the desired contour [11][12][13]. This procedure requires the smoothness and shape accuracy of the polished surface to be degraded as little as possible by WEDM in order to achieve superior optical performance.…”
Section: Introductionmentioning
confidence: 99%