2016
DOI: 10.1038/srep18892
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Manual, In situ, Real-Time Nanofabrication using Cracking through Indentation

Abstract: Nanofabrication has seen an increasing demand for applications in many fields of science and technology, but its production still requires relatively difficult, time-consuming, and expensive processes. Here we report a simple but very effective one dimensional (1D) nano-patterning technology that suggests a new nanofabrication method. This new technique involves the control of naturally propagating cracks initiated through simple, manually generated indentation, obviating the necessity of complicated equipment… Show more

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Cited by 10 publications
(11 citation statements)
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“…As propagating cracks typically continue to a free boundary, strategies to arrest cracks (i.e., crack stop or crack termination) are critical to the utility of this patterning approach. In prior work on crack-assisted fabrication, crack termination is normally achieved by patterning structures on the substrate before cracking, such as stair-profiled structures [32,53] or notch-tonotch termination sites. [30,31] These methods require additional multistep lithography processes for structural modification of the substrates.…”
Section: Resultsmentioning
confidence: 99%
“…As propagating cracks typically continue to a free boundary, strategies to arrest cracks (i.e., crack stop or crack termination) are critical to the utility of this patterning approach. In prior work on crack-assisted fabrication, crack termination is normally achieved by patterning structures on the substrate before cracking, such as stair-profiled structures [32,53] or notch-tonotch termination sites. [30,31] These methods require additional multistep lithography processes for structural modification of the substrates.…”
Section: Resultsmentioning
confidence: 99%
“…Nam et al 304 proposed a 1D patterning technology for nanofabrication purposes. In this technique, controlled propagation of a crack initiated with a simple manually generated indentation creates the channels.…”
Section: Fabricationmentioning
confidence: 99%
“…This method can create nanochannels as narrow as 10 nm with high aspect ratio and infinite length. Adapted from ref . Copyright 2016 Springer Nature.…”
Section: Fabricationmentioning
confidence: 99%
“…18 Softlithography-like replica molding typically results in buckling, pairing, or collapse of HAR nanostructures. 19 Patterning HAR structures based on dissolving templates 20 or controllable cracking 21 is not scalable or limited in terms of geometric design. Nanoimprint lithography (NIL) has emerged as a powerful nanofabrication technique for a broad range of applications in electronics, photonics, microfluidics, and biomedicine.…”
Section: Introductionmentioning
confidence: 99%