Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy

Чхало, Н. И.; Kluenkov, E. B.; Pestov, A. E.; Полковников, В. Н.; Raskin, Denis G.; Салащенко, Н. Н.; Suslov, L. A.; Toropov, M. N.

doi:10.1016/j.nima.2008.12.160

Cited by 23 publications

(4 citation statements)

References 3 publications

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“…Hence, the optimum energy range for ion beam polishing of the Ti6Al4V sample should be between 400 and 700 eV. Since there have been some researches with good surface roughness improvement results of a variety of metal materials by low energy IBP [39,40], together with the experiment results, the Ar ion energy to proceed the following research is chosen to be 600 eV. Fig.…”

Section: Methodsmentioning

confidence: 99%

Large current ion beam polishing and characterization of mechanically finished titanium alloy (Ti6Al4V) surface

Zhou

et al. 2019

Applied Surface Science

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Ti6Al4V samples with a surface roughness of about 0.2 μm were polished by a high fluence ion beam source, and influences of the ion current, energy and incident angle on the surface roughness of Ti6Al4V were studied. The as-polished surfaces were characterized by laser scanning confocal microscopy (LSCM), atomic force microscopy (AFM), grazing incidence X-ray diffraction (GIXRD) and X-ray photoelectron spectroscopy (XPS). The LSCM images revealed that the density of pits in the original surface decreased greatly after the ion polishing process. In addition, the surface roughness calculated from these images proved that the mean value reduced to 53 nm with an ion energy, current and incident angle of 600 eV, 130 mA and 75°, respectively. The smoothing effect was also confirmed by the power spectral density (PSD) functions calculated from the AFM data. GIXRD patterns indicated that the Ti6Al4V samples mainly contain the hexagonal close packed (HCP) α-Ti, no recognizable peaks corresponding to the body centered cubic (BCC) β-Ti were observed. Furthermore, after the ion beam polishing process, the phase of all the as-polished samples kept steady. The XPS results revealed that C, O, Ti, Al and V were present in both the original as well as the polished samples. In addition, due to the highly reactive characteristics of Ti, Al and V elements, a higher signal for oxygen can also be observed on the outermost surface of the ion beam polished samples. The polishing process of Ti6Al4V surface bombarded by Ar ion beam is also simulated by binary collision approximation (BCA) code SDTrimSP, the effects of ion beam energy and incident angle on the sputtering yield were investigated. The results showed that the sputtering yield of Ti, Al and V atoms increased almost linearly with the ion energy. However, as for the influence of ion incident angle, the sputtering yield first increased gradually from 0° and peaked at about 65°, then decreased rapidly because the incident angle is too large for Ar ion to penetrate into the surface of Ti6Al4V sample.

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Section: Methodsmentioning

confidence: 99%

Large current ion beam polishing and characterization of mechanically finished titanium alloy (Ti6Al4V) surface

Zhou

et al. 2019

Applied Surface Science

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“…Нанофизика и наноэлектроника" 1923 В наибольшей степени этим требованиям удовлетворяет ионно-пучковое травление [5][6][7][8]. Это бесконтактный метод обработки поверхности, основанный на физическом явлении распыления материала с поверхности под воздействием ионной бомбардировки.…”

Section: международный симпозиум "unclassified

Ионно-Пучковые Методики Прецизионной Обработки Оптических Поверхностей

Забродин¹,

Зорина²,

Каськов³

et al. 2020

Журнал Технической Физики

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Описаны методики прецизионной обработки поверхности оптических элементов пучками ускоренных ионов. Приведены характеристики и возможности оборудования, а также решаемые с помощью него задачи. Подробно описаны возможности финишной коррекции локальных ошибок формы малоразмерным ионным пучком, осесимметричной коррекции/асферизации широкоапертурным сильноточным ионным пучком и ионной полировки. Представлены значения эффективной шероховатости поверхности плавленого кварца, ситалла, Zerodur'а, ULE в диапазоне пространственных частот q[2.5·10-2-6.0·101 μm-1], а также примеры формирования сферической поверхности и профиля асферизации. Ключевые слова: ионно-пучковая методика, пучок ускорения, кварц, ситалл.

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“…Из-за малой длины волны спецификой задачи являются более жесткие требования к шероховатости, на уровне n • 0.1 nm, и точности формы, nm. Как правило, для достижения нанометровой точности формы поверхности на финальной стадии изготовления подложек для зеркал используется ионно-пучковая коррекция локальных ошибок формы [15][16][17].…”

Section: полируемость и формообразование бериллиевых подложекunclassified

Бериллий Как Материал Для Термостойких Рентгеновских Зеркал

Чхало¹,

Зорина²,

Малышев³

et al. 2019

Журнал Технической Физики

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Thermophysical and mechanical characteristics of beryllium are compared with the corresponding characteristics of promising materials that are used for fabrication of precision mirrors working under high-intensity electromagnetic irradiation. Advantages and prospects for application of beryllium in the third- and fourth-generation synchrotrons are discussed. An original method for fabrication of ultrasmooth surfaces of beryllium substrates is presented, and limiting roughnesses are reported. Reflectances at a wavelength of 13.5 nm are determined for a multilayer Mo/Si mirror deposited on the beryllium substrate. Prospects for improving quality of polishing of beryllium substrates are discussed.

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Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy

Cited by 23 publications

References 3 publications

Large current ion beam polishing and characterization of mechanically finished titanium alloy (Ti6Al4V) surface

Large current ion beam polishing and characterization of mechanically finished titanium alloy (Ti6Al4V) surface

Ионно-Пучковые Методики Прецизионной Обработки Оптических Поверхностей

Бериллий Как Материал Для Термостойких Рентгеновских Зеркал

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