2012
DOI: 10.1016/j.ssi.2012.01.007
|View full text |Cite
|
Sign up to set email alerts
|

Measurement of the across-plane conductivity of YSZ thin films on silicon

Abstract: Across-plane conductivity measurements on ion conducting thin films of a few ten nanometers thickness are challenging due to frequently occurring short-circuits through pinholes in the layer. In this contribution, a method is proposed which allowed across-plane conductivity measurements on yttria stabilized zirconia (YSZ) layers with thicknesses as low as 20 nm. YSZ layers were prepared onto silicon substrates with a thin native silica interlayer and the across-plane conductivity was measured on circular micro… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

3
20
0

Year Published

2012
2012
2020
2020

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 31 publications
(23 citation statements)
references
References 34 publications
3
20
0
Order By: Relevance
“…As s/r decreases, the region of high current density associated with the MTFB micro‐contact (reaching approximately four times the micro‐contact radius), begins to interfere with the full surface contact, Figure C. Due to this configuration, the current flow is more homogeneous as there is not enough room to spread out and is therefore better fitted with a geometric factor rather than using the spreading resistance equation, Figure , in agreement with previous studies . For all micro‐contact sizes modeled, the calculated conductivity using this equation is within 10% error at an s/r of 0.1 (black squares in Figure A‐C).…”
Section: Discussionsupporting
confidence: 83%
“…As s/r decreases, the region of high current density associated with the MTFB micro‐contact (reaching approximately four times the micro‐contact radius), begins to interfere with the full surface contact, Figure C. Due to this configuration, the current flow is more homogeneous as there is not enough room to spread out and is therefore better fitted with a geometric factor rather than using the spreading resistance equation, Figure , in agreement with previous studies . For all micro‐contact sizes modeled, the calculated conductivity using this equation is within 10% error at an s/r of 0.1 (black squares in Figure A‐C).…”
Section: Discussionsupporting
confidence: 83%
“…Karthikeyan et al, 68 and Jiang et al 69 also observed similar conductivity increases in YSZ grown on MgO, Al 2 O 3 , and Si substrates. Conductivity increases of similar magnitudes were also observed in gadolinium doped ceria (GDC) by Suzuki et al 70 and Huang et al 71 Multilayered structures studied by Korte, Janek and co-workers [72][73][74][75] have also 77 deposited YSZ on Si (001). Both these studies reported 3-4 times decrease in conductivity compared to polycrystalline YSZ.…”
Section: Interface Effects On Oxygen Diffusionsupporting
confidence: 58%
“…The cross‐plane geometry is also more realistic, because current flows perpendicular to the film plane in most applications, e.g., in micro‐solid oxide fuel cells 32–40. In literature, only few studies on cross‐plane measurements have been reported up to now, and all of them were done on YSZ thin films with columnar microstructures 36, 41–43. To avoid short circuits through pinholes, rather high film thicknesses between 500 nm and 1.5 µm were used 41, 42, or YSZ films as thin as 20 nm were measured together with their Si/SiO x substrate 43.…”
Section: Introductionmentioning
confidence: 99%