Metal Organic Deposition of Epitaxial Y123 Films Using a Low-Cost Vacuum Technique

Abstract

Epitaxial YBa 2 Cu 3 O 7 (Y123) films were obtained by metal-organic deposition (MOD) using a simple, low-cost vacuum technique without gas flowing. The total pressure and oxygen partial pressure in the furnace were controlled to be 10 kPa and 10 Pa, respectively, by evacuation with a rotary pump followed by refilling with a mixture of O 2 and N 2 (O 2 content: 1000 ppm). XRD analyses exhibited that -axis-oriented epitaxial Y123 films have successfully been obtained on CeO 2 -buffered YSZ (100) (CbZ) and CeO 2 -buffered sapphire (012) (CbS) substrates. In-plane alignments of these films were as high as that of the CeO 2 buffer layer. The film on the CbZ demonstrated a high critical current density c of 2 1 MA cm 2 at 77 K all over the film; the fluctuation of c being within 10% of the average. Inductive c measurement showed a very sharp peak with c = 90 5 K. Inductive-c and c of the Y123 film on CbS were 1.1 MA cm 2 and 89.6 K, respectively, whereas the c of the Y123 film on LaAlO 3 was lower than 77 K owing to the occurrence of the -axis grains.Index Terms-Critical current density, epitaxial Y123 film, metal-organic deposition, vacuum.

Epitaxial 0.65PbMg1/3Nb2/3O3–0.35PbTiO3 (PMN–PT) thin films grown on LaNiO3/CeO2/YSZ buffered Si substrates

“…Among various buffer layer materials, metallic perovskitetype oxides, such as La 0.5 Sr 0.5 CoO 3 (LSCO) [6], LaNiO 3 (LNO) [7], YBa 2 Cu 3 O 7−ı (YBCO) [8], and SrRuO 3 (SRO) [9], have been used as the epitaxial template for the growth of ferroelectric films and bottom electrodes. For the selection of bottom electrodes, pseudocubic LNO, with a lattice parameter of 0.384 nm, is a conductive oxide that shows promise.…”

Preparation of large-size Y123 films on CeO2-buffered sapphire substrates by MOD using a low-cost vacuum technique

“…In the TFA-MOD process, a vacuum technique was tried to shorten the total annealing time [5]. Likewise, in our acetylacetonate-based fluorine-free MOD process, it is of great interest to investigate whether the Y123 growth rate is enhanced or not if the heat treatment is carried out at reduced total pressures [6,7]. In this system, the removal of CO 2 associated with Y123 formation from BaCO 3 should be related to the Y123 growth rate.…”

Characteristics of Resistive Fault Current Limiting Elements Using YBCO Superconducting Thin Film With Meander-Shaped Metal Layer

“…1. The FCL element had YBCO thin film superconductor fabricated by the MOD (Metal Organic Deposition) method, and had a layer structure of on a sapphire substrate [9]. The YBCO superconductor was about 40 mm wide, 50 mm long , and 200 nm thick.…”

“…Fig. 3 shows the distribution of the superconducting film, which was measured by an inductive method [9] and used in numerical analysis. The critical current calculated from the data was about 230 A.…”