Method for gauge block measurement with the heterodyne central fringe identification technique

Abstract

In a modified Michelson interferometer, the top face of the wringing platen is first identified using the heterodyne central fringe identification technique. Then the reference mirror located in the other arm is moved by a precision translation stage until the top face of the tested gauge block is also identified with the same technique. The displacement of the mirror is exactly equivalent to the length of the tested gauge block. The measurable range of the interferometer relates to the maximum travel range of the translation stage and its uncertainty depends on the uncertainty of the heterodyne central fringe identification method and the resolution of the translation stage.

Dimensional artefacts to achieve metrological traceability in advanced manufacturing

“…[78], [194]) and many interferometric set ups are reported (e.g. [32], [40], [43], [134], [136], [200], [291]). Some authors have introduced measuring principles other than phase-measuring interferometry, including optical frequency combs [161] and remote calibration by means of optical fibres [205].…”