Micro-optic reflection and transmission interferometer for complete microlens characterization

Gómez, Virginia; Ghim, Young-Sik; Ottevaere, Heidi; Gardner, Neil; Bergner, Brent C.; Medicus, Kate; Davies, Angela; Thienpont, Hugo

doi:10.1088/0957-0233/20/2/025901

Cited by 12 publications

(8 citation statements)

References 13 publications

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“…Focal lengths were further measured by using micropositioning stages, evaluating the difference between the cat's eye and confocal positions [44]. The measured focal lengths are in good agreement with the estimated ones.…”

Section: Resultssupporting

confidence: 52%

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Graded-size microlens array by the pyro-electrohydrodynamic continuous printing method

et al. 2013

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In the present work, the pyro-electrohydrodynamic technique was used for the realization of tunable-size microlens arrays. Poly(methyl methacrylate) dissolved in different solvent mixtures was used as the polymeric material for the realization of the microstructures. By controlling the experimental parameters and in particular, the volume of the drop reservoir, graded-size square arrays of tens of microlenses with focal length in the range 1.5-3 mm were produced. Moreover, the optical quality and geometrical features were investigated by profilometric and interferometric analysis.

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Section: Resultssupporting

confidence: 52%

“…All the microlenses were also analyzed by means of a Mach-Zehnder system in confocal configuration. A single-path interferometer was selected, thanks to the better resolution of the microlens aberration with respect to a double-path interferometer such as a Twyman-Green interferometer [43,44].…”

Section: Resultsmentioning

confidence: 99%

Graded-size microlens array by the pyro-electrohydrodynamic continuous printing method

et al. 2013

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“…The most common method for phase measurement is interferometry. Two types of interferometers have mainly been applied to microlens testing: the Mach-Zehnder type [46][47][48][49] and the Twyman-Green type. 37,[47][48][49] Both interferometers are used in different configurations: usually, the probing wave is either plane or spherical, and the on-axis wavefront aberration is recorded.…”

Section: Wavefrontmentioning

confidence: 99%

Commented review on refractive microlenses and microlens arrays metrology

Béguelin

Voelkel

Scharf

2021

J. Optical Microsystems

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The fabrication of high-quality microlenses is possible only when it is assisted by efficient and accurate metrology. For this reason, developing expertise in measurement procedures is crucial for the micro-optics manufacturer. We review and comment on this topic by first discussing what features of microlenses must be characterized and controlled. We then review the existing techniques and instruments that can be employed for this task. Finally, we detail the limitations of these different methods, we compare them, and we propose practical guidelines to setup effective metrology methodology. We believe that this paper can be an introduction to the topic but also serves as a reference document for the more experienced reader. © The Authors.Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…5. The initial concept of a dual channel system was introduced for characterization of microelements [43,44]; however, here one channel uses coherent light, and the other noncoherent light. The holographic microscope is based on a transmission Mach-Zehnder interferometer scheme (red color of a beam).…”

Section: A Measurement Systemmentioning

confidence: 99%

High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

et al. 2014

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High-precision topography measurement of micro-objects using interferometric and holographic techniques can be realized provided that the in-focus plane of an imaging system is very accurately determined. Therefore, in this paper we propose an accurate technique for in-focus plane determination, which is based on coherent and incoherent light. The proposed method consists of two major steps. First, a calibration of the imaging system with an amplitude object is performed with a common autofocusing method using coherent illumination, which allows for accurate localization of the in-focus plane position. In the second step, the position of the detected in-focus plane with respect to the imaging system is measured with white light interferometry. The obtained distance is used to accurately adjust a sample with the precision required for the measurement. The experimental validation of the proposed method is given for measurement of high-numerical-aperture microlenses with subwavelength accuracy.

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Micro-optic reflection and transmission interferometer for complete microlens characterization

Cited by 12 publications

References 13 publications

Graded-size microlens array by the pyro-electrohydrodynamic continuous printing method

Graded-size microlens array by the pyro-electrohydrodynamic continuous printing method

Commented review on refractive microlenses and microlens arrays metrology

High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

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