2002
DOI: 10.1016/s0924-4247(02)00303-5
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Micromachined optical waveguide cantilever as a resonant optical scanner

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Cited by 24 publications
(17 citation statements)
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“…Unique circumferential line scanning has been demonstrated using a dual-reflectance large scan MEMS mirror, but again the device footprint is 2×2 mm 2 [64]. Smaller device diameters are theoretically possible using the scanning of a MEMS cantilever originally proposed by Dickensheets & Kino [65] for a confocal geometry and by Wang et al [66] in a non-confocal geometry. Ultimately, MEMS designs have not translated to the commercial market, possibly as a result of high fabrication set-up costs and limited application given the small FOV and relatively large diameters.…”
Section: Ultrathin Endoscopic Technologies Under Developmentmentioning
confidence: 99%
“…Unique circumferential line scanning has been demonstrated using a dual-reflectance large scan MEMS mirror, but again the device footprint is 2×2 mm 2 [64]. Smaller device diameters are theoretically possible using the scanning of a MEMS cantilever originally proposed by Dickensheets & Kino [65] for a confocal geometry and by Wang et al [66] in a non-confocal geometry. Ultimately, MEMS designs have not translated to the commercial market, possibly as a result of high fabrication set-up costs and limited application given the small FOV and relatively large diameters.…”
Section: Ultrathin Endoscopic Technologies Under Developmentmentioning
confidence: 99%
“…The optical scanner consists of a microfabricated waveguide that is electromechanically deflected by a 2D piezoelectric actuator [15,16]. While functional, the original scanner design has a relatively large footprint (each individual driving actuator is 20×4.8×0.6 mm 3 ) and is difficult to replicate accurately.…”
Section: Introductionmentioning
confidence: 99%
“…It is important to mention that both Ollier [8] and Chen et al [9] included additional lateral beams in their design in order to reduce stress-induced out-of-plane bending of the structure. Wang [10] successfully released 2 μm thick thermal SiO 2 with no additional lateral beams. The suspended SiO 2 structures were instead supported by a 28 μm-38 μm thick layer of Si.…”
Section: Introductionmentioning
confidence: 99%