Micromachining by ion track lithography

Thornell, Greger; Spohr, R.; Veldhuizen, E.J. van; Hjort, Klas

doi:10.1016/s0924-4247(98)00268-4

Cited by 20 publications

(5 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…After a relatively low dose to define the pores for paraffin application, the samples could be subjected to a second more intensive irradiation through a stencil mask with openings corresponding to the contours of the device. This approach is called micromachining by ion track lithography [16]. With properly balanced exposures, a single etching step will give the right porosity and liberate the device from its sheet at the same time.…”

Section: Discussionmentioning

confidence: 99%

A thermal microactuator made by partial impregnation of polyimide with paraffin

Klintberg

Thornell

2002

J. Micromech. Microeng.

View full text Add to dashboard Cite

We have fabricated and tested thermal, paraffin-impregnated polyimide actuators, utilizing the large volume increase associated with the solid-to-liquid phase transition of paraffin. In the bimorph-like device, the top layer was made porous by ion track technology. Stochastically distributed pores of various lengths (95, 70, 45 and 20 µm) and various lateral coverages (5–45%) were filled with paraffin by liquid substitution or from vacuum, and sealed with epoxy. Actuators, 125 µm thick, 35 mm long and 7 mm wide, have been characterized with respect to tip deflection and load-carrying capacity with one end rigidly clamped. Loaded with 0.6 g or about ten times their own weight at their free end, about 50% of the maximum stroke (17 mm) was still attained.

show abstract

Section: Discussionmentioning

confidence: 99%

A thermal microactuator made by partial impregnation of polyimide with paraffin

Klintberg

Thornell

2002

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Ion track projection lithography has been demonstrated several times, e.g. [32,33], with a recent extension into nanolithography with pattern transfer into amorphous silicon dioxide and titanium dioxide [34][35][36].…”

Section: Ion Track Projection Lithographymentioning

confidence: 99%

Ion track enabled multiple wire microvia interconnects in printed circuit boards

Yousef

Lindeberg

Hjort

2008

Nuclear Instruments and Methods in Physics Research Section B:

View full text Add to dashboard Cite

“…Edge definition and surface smoothness increase with ion fluence, with superb quality reached at 10 9 -10 10 ions cm −2 (Thornell et al, 1999). The depth of the structure is controlled by the energy of the ion beam.…”

Section: Technological Applications Including Ion Track Microtechnologymentioning

confidence: 99%

Science and technology with nuclear tracks in solids

Price

2005

Radiation Measurements

View full text Add to dashboard Cite

Micromachining by ion track lithography

Cited by 20 publications

References 8 publications

A thermal microactuator made by partial impregnation of polyimide with paraffin

A thermal microactuator made by partial impregnation of polyimide with paraffin

Ion track enabled multiple wire microvia interconnects in printed circuit boards

Science and technology with nuclear tracks in solids

Contact Info

Product

Resources

About