2014
DOI: 10.1016/j.tsf.2014.07.037
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Microstructural and elasto-plastic material parameters identification by inverse finite elements method of Ti (1−x) Al x N (0 < x < 1) sputtered thin films from Berkovich nano-indentation experiments

Abstract: Microstructural and elasto-plastic material parameters identification by inverse finite elements method of Ti (1-x) Al x N (0 < x < 1) sputtered thin films from Berkovich nanoindentation experiments M.J. Pac (a) , S. Giljean (a) , C. Rousselot (b) , F. Richard (c) , P. Delobelle (c)*

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Cited by 20 publications
(20 citation statements)
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“…The identifiability index used for measuring the information richness in indentation curves and residual topographies is described. This index has been introduced for the first time by Richard et al (Richard et al, 2013) for viscoelastic characterization from the sole indentation force, then in 2014 for plastic characterization from the sole indentation force (Pac et al, 2014). In this section, the identifiability index definition is extended to plastic characterization using residual topographies.…”
Section: Plastic Parameter Identifiability Methodsmentioning
confidence: 99%
“…The identifiability index used for measuring the information richness in indentation curves and residual topographies is described. This index has been introduced for the first time by Richard et al (Richard et al, 2013) for viscoelastic characterization from the sole indentation force, then in 2014 for plastic characterization from the sole indentation force (Pac et al, 2014). In this section, the identifiability index definition is extended to plastic characterization using residual topographies.…”
Section: Plastic Parameter Identifiability Methodsmentioning
confidence: 99%
“…where ̅ is a dimensionless pseudo-hessian matrix computed by forward finite difference method (Pac et al, 2014;Richard et al, 2013). The components of ̅ are given as:…”
Section: Inverse Methods For the Materials Parameters Estimationmentioning
confidence: 99%
“…The analysis can be done before and after the updating process and therefore does not necessarily require the experimental measurements (only pseudo-experimental loading). The -index is a measure of the conditioning of the inverse problem and is defined as (Pac et al, 2014):…”
Section: Parametric Identifiabilitymentioning
confidence: 99%
“…Indentation moduli M bhklN and Berkovich hardnesses H BbhklN of the as-deposited thin films have been presented in ref. [29]. Toughness has been determined using the CPR s criterion proposed by Zhang et al [30].…”
Section: Nano-structurementioning
confidence: 99%
“…For Al-rich films, a more brittle behaviour with the creation of wear debris is observed whatever the target used. For Ti 0.32 Al 0.68 N (M), no abrasion scar is observed because the trapped debris widely spread over the wear track due to a low hardness [13,29]. For Ti 0.38 Al 0.62 N (S), wear mechanisms are different as abrasion scars appear in the wear track and debris are pushed at the end of it.…”
Section: Tribological Propertiesmentioning
confidence: 99%