Microstructuring of Preceramic Polymers

Polymer derived ceramic microparts from X-ray lithography—cross-linking behavior and process optimization

“…The microstructures were converted into ceramics after the patterning and development steps at temperatures up to 1500 • C. Further information on the process used for the micro structuring can be found in previous publications. 6 …”

“…3,4 By using lithographic methods, the direct micro structuring of preceramic polymers is possible. 5,6,10 The crosslinking mechanism under irradiation conditions was investigated and a process to achieve native substrates that shrink homogeneously during pyrolysis was developed. Microstructures were replicated using a test mask in lithographic processes on such substrates.…”

Fabrication of Al2O3/SiC Composite Microcomponents using Non‐aqueous Suspension

“…[15] In addition, they have been used to fabricate net shape monolithic ceramic MEMS by either microcasting a liquid ceramic precursor into a mold that has been prepared by conventional lithographic methods or by microforged molds. [16,17] Recently, polymer ceramics have been successfully used to fabricate Al 2 O 3 /SiC by hot pressing of poly allyl carbosilane-coated alumina powder into green pattern shapes, with subsequent pyrolysis and pressureless sintering. [18] This paper introduces a new process for fabrication of high resolution Al 2 O 3 /SiC composite microcomponents using softlithography and non-aqueous ceramic suspension.…”

Synthesis and characterization of continuous freestanding silicon carbide films with polycarbosilane (PCS)

“…The method was reported to be more actual for the fabrication of MEMS. [16][17][18][19][20][21][22][23][24][25][26] However, to the knowledge of the authors, there is no report concerning the preparation of continuous freestanding SiC films. Continuous freestanding films could avoid the coating/substrate interaction resulted from the techniques mentioned above.…”