Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures

Rapid interferometric imaging of printed drug laden multilayer structures

“…The instrument can determine profiles with ±15 nm accuracy along the z-direction. A detailed description of the VIS interferometer is given in 17 . In the receiving part we employed a 3.63 μm pixel size black and white camera (Hamamatsu C11440 Orca Flash2.8, Hamamatsu City, Japan).…”

“…None of these methods fulfill the requirements presented by the current case (personalized drugs produced at point-of-care). Non-contacting, rapid, and non-destructive SWLI allow the possibility to determine surface roughness, the geometric thickness of layered structures, the adherence between the layers, and the thickness of each individual layer 17 . Here we report the first implementation of scanning white light interferometry to study these features of layered drug-delivery systems.…”

The state of the art in interference microscopy: Modern techniques for geometric form, surface texture and areal structure analysis

“…Recent advances include increased accommodation of steep slopes and difficult materials (Fig. 3) [10], new objectives for large fields of view [11], and methods for parameter metrology of optically-unresolved surface structures [12]. Many of these new technologies rely on advanced modeling of the interference phenomenon, including a deeper understanding of how wavefronts are modulated by surface details and material properties [13].…”

Solving the inverse grating problem by white light interference Fourier scatterometry

“…[4][5][6][7] Because additional depth sensitivity for nanostructures is often required, a combination of profile-sensitive Fourier scatterometry with white light interferometry, which takes advantage of the superior subnanometer resolution for topographic measurements, has been studied. de Groot et al 8,9 showed that imaging the pupil plane makes it possible to measure the incident angle-dependent angular response. In addition, performing a Fourier analysis of the white light signal even facilitates wavelength-dependent ellipsometric measurements with only one measurement.…”