2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) 2022
DOI: 10.1109/inertial53425.2022.9787750
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Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes

Sebastian Weidlich
1
,
Roman Forke
2
,
Karla Hiller
3
et al.
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Vibration sensors with a high bandwidth and low SNR, enhanced with post processing gap reduction

Streit
1
,
Forke
2
,
Voigt
3
et al. 2022
2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and
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Vibration sensors with a high bandwidth and low SNR, enhanced with post processing gap reduction

Streit
1
,
Forke
2
,
Voigt
3
et al. 2022
2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and
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0
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Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope

Forke
1
,
Shaporin
2
,
Weidlich
3
et al. 2023
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
3
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Active Probe Card for Multi-Parameter Fast Characterization of Mems Gyroscope at Wafer-Level

Zhao,
Shi,
Xia
et al. 2024
2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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