Multimode interferometric sensors on silicon optimized for fully integrated complementary-metal-oxide-semiconductor chemical-biological sensor systems

Lillie, Jeffrey J.; Thomas, M.; Jokerst, N.; Ralph, Stephen E.; Dennis, Karla A.; Henderson, Clifford L.

doi:10.1364/josab.23.000642

Cited by 23 publications

(8 citation statements)

References 16 publications

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“…However, M‐IR spectrometers tend to be bulky and sensitive to vibrations, which limits their use in applications that require small, light weight, and stable spectrometers, for application in satellites and drones . Optical methods, such as Mach–Zehnder interferometry and fiber‐probe‐based interferometric sensors have been recently discussed for chemical and biological sensing. However, these approaches are not easily scaled down due to the large optical interaction lengths, which are required to detect measurable changes to the intensity and phase of light.…”

Section: Introductionmentioning

confidence: 99%

Tunable Mid‐Infrared Phase‐Change Metasurface

Dong

Qiu

Zhou

et al. 2018

Advanced Optical Materials

129

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reduce the size of these sensors, [4][5][6][7][8][9][10][11][12] since it exhibits a unique surface condition with tailored spectral properties and strong electric field enhancement, which results in a high sensitivity to the surroundings. [13][14][15][16][17][18][19][20][21] To date, most approaches toward metamaterial inspired sensors are based on perfect light absorption. [17,19,22,23] However, the measurement of their reflectance makes both optical alignment and chip integration challenging. [24] Furthermore, metamaterial sensors that are designed for the M-IR are rarely discussed because robust sources, detectors, and efficient components are limited. [25] In addition, despite metamaterial sensors exhibiting excellent sensitivity at their designed frequency, demonstrations of wideband or frequency-swept detection are uncommon. This is because the metamaterial optical response is usually fixed by its dimensions and dielectric properties. [26] Consequently, measurements at different wavelengths using a single metamaterial device are impossible. Recently, metamaterials that are tuned by integrating graphene, [27] vanadium dioxide, [28] liquid crystals, [29] and metal hydrides [30] were investigated. Particularly, the graphene [27] and vanadium dioxide [28] based metasurfaces are promising for dynamically tuning plasmonic induced transparency.Note, these tuning mechanisms tend to be impractical in the M-IR region because the materials involved have a strong Drude contribution to the dielectric function. The M-IR region is, however, an important spectral band where there exists an atmospheric transparency window and molecular vibrational fingerprints. [31][32][33] Chalcogenide phase change materials (PCMs) have a remarkable portfolio of properties. [34][35][36] In particular, unlike silica glasses, the low phonon energies of chalcogenides allow them to be transparent in the M-IR. [37] The fast switching between two structural states of the phase change data storage material, Ge 2 Sb 2 Te 5 (GST), make it ideal for active photonic devices. [34,[38][39][40][41][42][43][44][45][46][47][48] Notably, in the M-IR region GST exhibits a pronounced contrast in the real part of the permittivity (ε r ), and a negligibly small ratio of the imaginary (ε i ) to the ε r , indicating low absorptive losses. [49,50] In addition, it is now possible to design the nanostructure of GST to achieve specific switching characteristics. [51,52] Thus, there is evidence that chalcogenide PCMs can enable practical spectroscopically programmable M-IR metamaterials.In this work, we demonstrate a phase change material tuned transmissive M-IR metasurface. The metasurface consists of an array of Au square pillars stacked above a GST switchable layer. Contrary to other metal-dielectric-metal trilayer reflective metamaterials, our design works in transmission mode by avoidingThe intense light-matter interaction of plasmonic metasurfaces provides an appealing platform for optical sensing. To date, most metasurface sensors are not spectrally tuned. Mo...

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Section: Introductionmentioning

confidence: 99%

Tunable Mid‐Infrared Phase‐Change Metasurface

Dong

Qiu

Zhou

et al. 2018

Advanced Optical Materials

129

View full text Add to dashboard Cite

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“…In the last two decades, a great number of integrated optical sensors based on Mach-Zehnder interferometers (MZI) have been realized to detect different chemical species as organic compounds [ 13 - 14 ] and proteins [ 15 - 17 ]. Technologies employed for fabrication of these sensors are prevalently CMOS-compatible (guiding film in silicon, silicon nitride or silicon oxynitride) but glasses [ 18 - 19 ] and III-V semiconductor compounds [ 20 ] technologies have been also proposed.…”

Section: Integrated Optical Biosensorsmentioning

confidence: 99%

Guided-Wave Optical Biosensors

Passaro

Dell’Olio

Casamassima

et al. 2007

Sensors

135

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Guided-wave optical biosensors are reviewed in this paper. Advantages related to optical technologies are presented and integrated architectures are investigated in detail. Main classes of bio receptors and the most attractive optical transduction mechanisms are discussed. The possibility to use Mach-Zehnder and Young interferometers, microdisk and microring resonators, surface plasmon resonance, hollow and antiresonant waveguides, and Bragg gratings to realize very sensitive and selective, ultra-compact and fast biosensors is discussed. Finally, CMOS-compatible technologies are proved to be the most attractive for fabrication of guided-wave photonic biosensors.

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“…The evanescent wave of a guided mode will feel this change, as well as the effective index of the guided mode, which will then be measured as the sensor response by using interference or resonance [18]. Using various interference structures, such as Mach-Zehnder [19] or Young interferometers [20], detection limits of 10 −7 -10 −9 have been demonstrated. However, such a small detection limit is realized through a long interaction length between the optical mode and the analyte, typically in the order of millimeter or centimeter.…”

Section: Introductionmentioning

confidence: 99%

Optical integrated chips with micro and nanostructures for refractive index and SERS-based optical label-free sensing

et al. 2015

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Label-free optical biosensing technologies have superior abilities of quantitative analysis, unmodified targets, and ultrasmall sample volume, compared to conventional fluorescence-label-based sensing techniques, in detecting various biomolecules. In this review article, we introduce our recent results in the field of evanescent-wavebased refractive index sensing and surface enhanced Raman scattering (SERS)-based sensing, both of which are promising platforms for label-free optical biosensors. First, silicon-on-insulator (SOI) nanowire waveguide and metallic surface plasmon resonance (SPR)-based refractive index sensing are discussed. In order to improve the detection limit, phase interrogation techniques are introduced to these types of sensors based on prism-coupled SPR and SOI microring resonators. A detection limit in the order of 10 −6 refractive index unit is achieved. Detection of 16.7 pM anti-IgG is also demonstrated based on the SPR devices. Second, SERS substrates based on various nanometallic structures are discussed. Metallic nanowire arrays and inverted nanopyramids and grooves with a thin metal surface are fabricated based on anisotropic wetetching of silicon substrates. Both structures have demonstrated a Raman signal enhancement on the order of 10 7 .In order to improve the extraction efficiency of the Raman signal at a high wave number, a nano-bowtie array substrate is fabricated, which exhibits double resonances at both the excitation wavelength and the desired Raman scattering wavelength. Experimental results have shown that this double-resonance structure can further enhance the received Raman signal, as compared to conventional SERS substrates with only one resonance at the excitation wavelength.

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Multimode interferometric sensors on silicon optimized for fully integrated complementary-metal-oxide-semiconductor chemical-biological sensor systems

Cited by 23 publications

References 16 publications

Tunable Mid‐Infrared Phase‐Change Metasurface

Tunable Mid‐Infrared Phase‐Change Metasurface

Guided-Wave Optical Biosensors

Optical integrated chips with micro and nanostructures for refractive index and SERS-based optical label-free sensing

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