Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS structures

Fiber optics low-coherence IR interferometry for defense sensors manufacturing

“…In past the alternative technique was presented, which did not suffer from above discussed limitations. Figure 1 represents a single probe Michelson interferometer similar to that used and described earlier [2,3,[5][6][7][8][9][10][11][12][13][14]. Light emitted by a light source LS is transmitted to and split into two portions by a single mode optical fiber to a 2x2 coupler BS.…”

“…Low coherence optical interferometry [1] has been proven to be an effective tool for characterization of thin and ultrathin semiconductor Si wafers, compound materials, MEMs, detector structures, light emitting devices and others [2][3][4][5][6][7][8][9][10][11][12][13][14]. The commonly employed tools for wafer thickness metrology are based on capacitance or air pressure methods.…”