One-dimensional reflective diffuser for line beam shaper with microlens array homogenizer

Abstract

A laser beam shaping architecture based on a microlens array homogenizer has been exploited, in which the interference effect due to the coherency of the laser source deteriorates the uniformity. Moving diffusers have been considered as an effective way of averaging out the interference pattern. Because the uniformity is required in the line direction only, a one-dimensional reflective-type diffuser with a well-controlled diffusion angle has been proposed and prototyped. The diffuser is attached onto a rotating cylinder for movement in operation. The experiment demonstrates the effectiveness of the scheme, and a line beam with a uniformity of up to 92% has been achieved.

Simulation study of decoherence and light intensity uniformization for extreme ultraviolet of uniform light pipe

“…制、及提高照明均匀性的方法主要有随机相位板 [11] 、 微透镜阵列 [14] 、扫描微镜 [15,16] 、旋转散射器 [17] 、反 射式扩散器 [18] 等方法. 当波长下降至EUV波段 时, 相应光学元件的设计和制造难度会随着目标波 长的缩短而加大 [12] .…”

Study on Preparation of Microstructured Optical Membrane

“…When the oligomer content was 55%, the film had a high light transmittance. At the same time, the prepared film was subjected to an apparent inspection with good microstructure replication accuracy.Microstructured optical elements are widely used in optical fields such as semiconductors, lasers, beam shaping [1][2] and solar energy [3][4][5] due to their unique advantages such as small size and high performance. As a key component in many industries, it has a high market demand rate.…”

“…Microstructured optical elements are widely used in optical fields such as semiconductors, lasers, beam shaping [1][2] and solar energy [3][4][5] due to their unique advantages such as small size and high performance. As a key component in many industries, it has a high market demand rate.…”