2016
DOI: 10.1088/2051-672x/4/2/024014
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Optical dimensional metrology at Physikalisch-Technische Bundesanstalt (PTB) on deep sub-wavelength nanostructured surfaces

Abstract: The dark-field microscopy method with alternating grazing incidence UV illumination (UV-AGID) developed at Physikalisch-Technische Bundesanstalt offers the possibility of measuring individual isolated line structures with linewidths down to the sub-wavelength regime. In contrast, scatterometry is able and already widely used to measure average dimensional parameters of periodic structures down to the deep sub-wavelength regime. Both methods can be used for dimensional measurements of micro-and nanostructures, … Show more

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Cited by 8 publications
(9 citation statements)
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“…Another important application for numerical optimization is the parameter reconstruction based on measured data . For example, optical scatterometry is the state-of-the-art optical inspection technique for quality control in lithographic processing . This indirect measurement procedure relies on a parametrization of the specimen’s geometry and a numerical simulation of the measurement process.…”
mentioning
confidence: 99%
See 1 more Smart Citation
“…Another important application for numerical optimization is the parameter reconstruction based on measured data . For example, optical scatterometry is the state-of-the-art optical inspection technique for quality control in lithographic processing . This indirect measurement procedure relies on a parametrization of the specimen’s geometry and a numerical simulation of the measurement process.…”
mentioning
confidence: 99%
“…9 For example, optical scatterometry is the state-of-the-art optical inspection technique for quality control in lithographic processing. 10 This indirect measurement procedure relies on a parametrization of the specimen's geometry and a numerical simulation of the measurement process. Based on multiple numerical simulations, one tries to identify the parameters that match best the measured data.…”
mentioning
confidence: 99%
“…For dimensionally confined systems (Fig. 4f), this assumption may break down (e.g., yield poor fits) thus requiring the accurate treatment of the anisotropy in ε (λ) as a tensor 94, 95 , and better treatment of this anisotropy is an area of continuing research for MMSE. Dimensional confinement is not just limited to 2D materials but also to features patterned from nominally isotropic materials but with sizes approaching near-atomic scales.…”
Section: Advanced Metrology Techniquesmentioning
confidence: 99%
“…Therefore, this research focuses on a subwavelength grating regime when the wavelength of light is longer than a grating period. The literature [5][6][7], suggests that deep subwavelength and near-subwavelength regimes should be separated due to different optical effects. Depending on the sample material, different wavelengths may have a big influence on the results.…”
Section: Introductionmentioning
confidence: 99%