1995
DOI: 10.1063/1.359062
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Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition

Abstract: Silicon nitride films were deposited at low temperatures (245370 "Cj and high deposition rates @OO-1700 A/mm) by hot filament assisted chemical vapor deposition (HFCVD). Optical properties of these amorphous silicon nitride thin films have been extensively characterized by absorption, photoluminescence (PL), photoluminescence excitation, and electroluminescence measurements. The optical band gap of the films was varied between 2.43 and 4.74 eV by adjusting the flow rate of the disilane source gas. Three broad … Show more

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Cited by 280 publications
(183 citation statements)
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“…Silicon nitride typically shows photoluminescence from radiative defects [5]. However, a systematic PL peak shift when changing the material stoichiometry (through controlled changes in deposition conditions) has been often reported [3,4,6,7].…”
Section: Resultsmentioning
confidence: 99%
“…Silicon nitride typically shows photoluminescence from radiative defects [5]. However, a systematic PL peak shift when changing the material stoichiometry (through controlled changes in deposition conditions) has been often reported [3,4,6,7].…”
Section: Resultsmentioning
confidence: 99%
“…Пики с более высокой энергией, наиболее вероятно, соответствуют люминесценции дефектов матрицы или дефектов на границе раздела нанокристалл −матрица, причем в структуре SO-1150 люминесценция дефектов не наблюдается, а в двух других структурах имеются два типа люминесцирующих дефектных центров. Люми-несценция дефектов в нитридной матрице исследована в работах [28][29][30][31][32]. Пики люминесценции дефектов N + 4 и N 0 2 находятся при энергиях 1.8 и 2.1 эВ, что близко к полученным нами значениям.…”
Section: результаты и их обсуждениеunclassified
“…9b) and theoretical energy transitions [42][43][44][45][46][47] that may thus be associated to specific electronic transitions, as reported on Fig. 10.…”
Section: Refractive Index Propertiesmentioning
confidence: 99%