“…The low deposition rates that one can obtain in IBD also result in a good film thickness uniformity. Furthermore, the deposition parameters in IBD (ion flux, energy and species or angle of incidence) can be more independently controlled and optimized than in other sputtering systems [10,11]. Note that IBD was successfully used to fabricate advanced magnetic nanostructures like multilayers [12], spin valves [9,10,13] and both AlO x [14,15] and MgO [16] magnetic tunnel junctions.…”