Oxygen sensing at high temperatures using Ga2O3 films

ALD and MOCVD of Ga2O3 Thin Films Using the New Ga Precursor Dimethylgallium Isopropoxide, Me2GaOiPr

“…[36] Ga-doped zinc oxide (ZnO:Ga, GZO) is a wellknown n-type TCO material. [37] Thin films of gallium oxide have been prepared by various methods: (radiofrequency) magnetron sputter deposition, [1][2][3][4]6,7,9,10,12,25,27] electron beam evaporation, [15][16][17]21] pulsed laser deposition, [26,28,30,33,34,36] laser ablation, [31] CVD, [38][39][40][41][42][43][44][45][46][47] ALD, [48][49][50][51][52] molecular beam epitaxy, [32,35] vapor phase epitaxy, [53] spray pyrolysis, [54,55] and sol-gel process. [5,13,23,24] Among these methods, CVD is considered very important because it can readily be employed in industrial processes.…”

Formation of Oxide Nanowires by Thermal Evaporation and Their Application to Gas Sensors

“…For example, they have been studied as oxygen sensors operating at 600-1000°C (Babana et al, 2005;Schwebel et al, 2000). They have also been studied as sensors for detecting reducing gases such as H 2 , CO, CH 4 (Fleisher et al, 1992;Schwebel et al, 1998).…”

Oxygen Sensors Based on Screen Printed Platinum and Palladium Doped Indium Oxides

“…Different materials that have been investigated for this application including Ga2O3 [3], SnO2 [4], TiO2 [5], ZnO [6], In2O3 [7]. Among these materials, the latter has been reported to have a high sensitivity toward oxygen at low temperatures due to its high conductivity [8].…”