P‐81: Two Zones Method of Furnace‐Growing Technology to Control Grain Size of In₂O₃ Film on Gallium Nitride LED

Abstract

Surface-Roughing Method is effective to enhance the efficiency of the light emission of LEDs. We have developed a novel Furnace-Growing Technology of Surface-Roughing Method to enhance external quantum efficiency and control the grain size of Indium oxide (In 2 O 3 ) film on the top layer of GaN LEDs. The deposited Film of Indium oxide on GaNLEDs is crystallitic sharps and high uniformity of the thickness.