Passive Strain Sensor using SH-SAW Reflective Delay Line

Nomura, T.; Kosaka, Tomoe; Saitoh, A.; Furukawa, Shoji

doi:10.1080/00150190600689753

Cited by 17 publications

(6 citation statements)

References 5 publications

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“…Moreover, the signal disturbance resulting from the TTS occurring in piezoelectric substrates with a high electromechanical coupling constant was found to be minimized when the split IDT structure was used. The sensitivity measured by using the precise strain gauge we developed and the SAW device with low insertion loss and excellent signal stability was about five times higher than that of the SAWbased strain sensors reported previously [3][4][5]. Building on this research, we aim to develop a strain sensor that allows wireless communication in the future.…”

Section: Discussionmentioning

confidence: 95%

“…In addition, the existing sensor systems have difficulty with measuring crucial variables such as the load generated in the wheels and the friction coefficient on the ground connected to a road. To overcome these obstacles, various types of surface acoustic wave (SAW)-based strain sensors have been reported [3][4][5]. Kalinin et al proposed a strain sensor through a reflective delay line structure and Nomura et al reported a SAW strain sensor 0960-1317/12/025002+10$33.00 that is attached to a suspended cantilever structure.…”

Section: Introductionmentioning

confidence: 99%

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Development of a high-sensitivity strain measurement system based on a SH SAW sensor

Lee

Eun

et al. 2012

J. Micromech. Microeng.

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A strain measurement system based on a shear horizontal surface acoustic wave (SH SAW) was developed. The developed system is composed of a SAW microsensor, a printed circuit board (PCB), an adhesive and a strain gauge. When a compression force is applied to the PCB by the strain gauge, the PCB is bent so that external strain energy can be evenly delivered to the microsensor without any detachment of the sensor from the board. When a stretching force is applied to the PCB under the condition that one side of the PCB is fixed and the other side is modulated, the actual length of the SAW delay line between the two interdigital transducers (IDTs) is increased. The increase in the delay line length causes a change in the time for the propagating SAW to reach the output IDT. If strain energy is applied to the piezoelectric substrate, the substrate density is changed, which then changes the propagation velocity of the SAW. Coupling-of-modes modeling was conducted prior to fabrication to determine the optimal device parameters. Depending on the strain, the frequency difference was linearly modulated. The obtained sensitivity for stretching was 17.3 kHz/% for the SH wave mode and split electrode. And the obtained sensitivity for bending was 46.1 kHz/% for the SH wave mode and split electrode. The SH wave showed about 15% higher sensitivity than the Rayleigh wave, and the dog-bone PCB showed about 8% higher sensitivity than the rectangular PCB. The obtained sensitivity was about five times higher than that of existing SAW-based strain sensors.

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Section: Discussionmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

Development of a high-sensitivity strain measurement system based on a SH SAW sensor

Lee

Eun

et al. 2012

J. Micromech. Microeng.

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show abstract

“…However, it has a complicated structure and a high cost compared to EM transduction-based PSST. First, the received EM pulses are converted to SAW pulses by the inter-digital transducer (Nomura et al , 2006). The SAW pulses that travel through the piezoelectric substrate will be reflected by each of the reflective strips and then converted back to EM pulses.…”

Section: Operation Principlesmentioning

confidence: 99%

A review of passive self-sensing tag

Dong

Wang

et al. 2017

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Purpose Radio frequency identification tags for passive sensing have attracted wide attention in the area of Internet of Things (IoT). Among them, some tags can sense the property change of objects without an integrated sensor, which is a new trend of passive sensing based on tag. The purpose of this paper is to review recent research on passive self-sensing tags (PSSTs). Design/methodology/approach The PSSTs reported in the past decade are classified in terms of sensing mode, composition and the ways of power supply. This paper presents operation principles of PSSTs and analyzes the characteristics of them. Moreover, the paper focuses on summarizing the latest sensing parameters of PSSTs and their matching equipment. Finally, some potential applications and challenges faced by this emerging technique are discussed. Findings PSST is suitable for long-term and large-scale monitoring compared to conventional sensors because it gets rid of the limitation of battery and has relatively low cost. Also, the static information of objects stored in different PSSTs can be identified by a single reader without touch. Originality/value This paper provides a detailed and timely review of the rapidly growing research in PSST.

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“…Since the wave’s displacement components are parallel to the substrate surface and perpendicular to the propagation direction, little damping of the wave exists in fluid or liquid, and hence, detection sensitivity can be greatly improved. In addition, SH-SAW has an approximately 0.6 times higher velocity than Rayleigh waves [27,28], thus making it possible to develop sensors that have a smaller dimension while operating at a higher resonant frequency. Furthermore, when a wireless and passive working situation is involved, the strong signal response of SH-SAWs can provide a longer interrogation distance and better detection accuracy [27].…”

Section: Introductionmentioning

confidence: 99%

“…In addition, SH-SAW has an approximately 0.6 times higher velocity than Rayleigh waves [27,28], thus making it possible to develop sensors that have a smaller dimension while operating at a higher resonant frequency. Furthermore, when a wireless and passive working situation is involved, the strong signal response of SH-SAWs can provide a longer interrogation distance and better detection accuracy [27]. Therefore, SH-SAW is very suitable for acoustic-based torque sensors as compared to Rayleigh wave, showing a great potential in future.…”

Section: Introductionmentioning

confidence: 99%

A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors

Jiang

Chen

Cho

2019

Sensors

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In this paper, a three-dimensional finite element analysis (3D-FEA) model for shear horizontal surface acoustic wave (SH-SAW) torque sensors is presented. Torque sensors play a significant role in various fields to ensure a reliable torque transmission in drivelines. Featuring the advantages of high propagation velocity, large Q-value, and good power capacity, SH-SAW-based torque sensors are promising but very few studies have been carried out. In order to develop a successful sensor, understanding the characteristics of SH-SAWs produced on piezoelectric substrates and torque sensing modes is indispensable. Therefore, in this study, we first investigated the effect on the generation of waves when different Y-cut quartz substrates are engaged. Thereafter, analyses and comparisons regarding the effect on the polarized displacement, wave guidance, and wave mode were conducted for different configurations of wave-guide layer thickness to wavelength ratios (hlayer/λ) and materials. The results showed that Y-cut quartz at an angle close to 36° with a gold (Au) layer varying from hAu/λ = 0.02 to 0.03 thickness could be the most effective configuration for the excitation of SH-SAWs, compared to other combinations using platinum (Pt), titanium (Ti), and silicon dioxide (SiO2). Finally, based on the FEA SH-SAW torque sensor model configured with a Y + 36° quartz substrate and 0.025 λ-thick gold layer, the relationship between the applied torque and sensed voltage was examined, which shows a perfect linearity demonstrating the performance of the sensors.

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Passive Strain Sensor using SH-SAW Reflective Delay Line

Cited by 17 publications

References 5 publications

Development of a high-sensitivity strain measurement system based on a SH SAW sensor

Development of a high-sensitivity strain measurement system based on a SH SAW sensor

A review of passive self-sensing tag

A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors

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