Performance and Reliability of TiO₂/ZrO₂/TiO₂(TZT) and AlO-Doped TZT MIM Capacitors

Ultrathin ferroic HfO2–ZrO2 superlattice gate stack for advanced transistors

“…The use of short-period superlattices i.e. nanolaminates is common in the high-κ field to enhance permittivity [77][78][79][80][81] ; in particular, rutile-structure TiO 2 is often paired with fluorite-structure HfO 2 and/or ZrO 2 in DRAM capacitors 82 . Recently, fluorite-structure nanolaminates were employed to tune the ferroelectric behavior of HfO 2 -ZrO 2 films [83][84][85] .…”

Fabrication of Binder‐Free TiO2 Nanofibers@Carbon Cloth for Flexible and Ultra‐Stable Supercapacitor for Wearable Electronics

“…[ 13,14 ] Moreover, from the commercial point of view, TiO 2 is one of the most recognized and capable candidates because of its abundant and inexpensive nature with environmentally safe (green) properties and has been used in various electronic devices applications. [ 14–16 ]…”

A Technology-Computer-Aided-Design-Based Reliability Prediction Model for DRAM Storage Capacitors

“…For the first approach, storage capacitors are converted from planar into three-dimensional (3D) structures to maximize their aspect ratios [3]. Regarding the second approach, various types of high- k materials are introduced such as ZrO 2 [4], TiO 2 [5], and SrTiO [6], which tends to deteriorate the defect density and bandgap energy [7]. This implies that state-of-the-art DRAM storage capacitors suffer from reliability issues such as leakage current and time-dependent dielectric breakdown (TDDB) [8].…”