An
enhancement of computer performance following Moore’s
law requires the miniaturization of semiconductor devices. Presently,
their dimensions reach the nanoscale. Interfaces between materials
become increasingly important as the volume is reduced. It is shown
here how a pyramidal interface structure is formed irrespective of
the conditions applied during the growth of two semiconductors. This
drastically changes the common view of interfaces, which were assumed
to be either atomically abrupt or interdiffused. Especially in semiconductor
heteroepitaxy, a simple surface segregation of one atomic species
is often assumed. It is proven by first-principles computations and
kinetic modeling that the atom mobility during growth and the chemical
environment at the interface are the decisive factors in the formation
of the actual structure. Gallium phosphide grown on silicon was chosen
as representative, nearly unstrained material combination to study
the fundamental parameters influencing the interface morphology. Beyond
that, this system has significant impact for cutting-edge electronic
and optoelectronic devices. The findings derived in this study can
be generalized to aid the understanding of further relevant semiconductor
interfaces. This knowledge is crucial to comprehend current and steer
future properties of miniaturized devices.