Phase Shifting Scatter Plate Interferometer Using a Polarization Technique

Su, Der‐Chin; Shyu, Lih-Horng

doi:10.1080/09500349114550931

Cited by 16 publications

(7 citation statements)

References 8 publications

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“…The phase shift in this case is created by laterally shifting the grating. Huang et al [38], Su and Shyu [39], and North-Morris et al [15] have also proposed a point diffraction interferometer with slight modifications in the optical elements so that variable phase shifts can be produced. Particularly interesting is the method suggested by Morris et al in which phase shifting is achieved by exploiting the polarization characteristics of a birefringent scatterplate.…”

Section: Moving Ahead With Phasementioning

confidence: 97%

Moving ahead with phase

Patil

Rastogi

2007

Optics and Lasers in Engineering

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Section: Moving Ahead With Phasementioning

confidence: 97%

Moving ahead with phase

Patil

Rastogi

2007

Optics and Lasers in Engineering

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“…One method is by introducing a reference interferometer and vibration compensation system to the main interferometer to compensate the environmental disturbance [2][3][4]. Complete common-path interferometers such as the scatterplate interferometer are insensitive to noises as well [5][6][7]. These noise reduction approaches are generally used for laser-based phase-shifting interferometry, for which the applications are limited to measurement of relatively smooth surfaces due to the well-known 2π phase ambiguity problem of monochromatic interferometry.…”

Section: Introductionmentioning

confidence: 99%

Interferometry for Online/In-Process Surface Inspection

Gao¹

2017

Optical Interferometry

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Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environmental disturbance; and the other method is to realize the data sample in just one image shot. Each method has its own applications. With the advances of these technologies, the use of interferometry as a highly accurate and fast measurement method will become more common in shop floor measurements and inspections.

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“…Until now, three proposals to implement phase shifting in SI were reported. [5][6][7] They are briefly reviewed in Ref. 7.…”

Section: Introductionmentioning

confidence: 99%

Simple polarization phase-stepping scatterplate interferometry

Patorski

Sałbut

2004

Opt. Eng

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A simple polarized-light-based phase shifting method for analyzing fringe patterns formed in Burch's common-path scatterplate interferometer is proposed. The system employs circularly polarized beam at the input, a small quarter-wave plate acting on the reference beam only, and a rotating analyzer in two orthogonal circular polarization beams at the output of the interferometer. The simplicity of our approach is proved theoretically and experimentally. Problems related to nonideal light modulation at the output and the ways to overcome them are discussed.

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Phase Shifting Scatter Plate Interferometer Using a Polarization Technique

Cited by 16 publications

References 8 publications

Moving ahead with phase

Moving ahead with phase

Interferometry for Online/In-Process Surface Inspection

Simple polarization phase-stepping scatterplate interferometry

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