Plasma chemistry in fluorocarbon film deposition from pentafluoroethane/argon mixtures

Abstract

Plasma-enhanced deposition of fluorocarbon films was performed at 120°C from a mixture of pentafluoroethane (CF 3 CHF 2) and argon in a parallel plate plasma reactor. Mass spectrometry of the reactor effluent was used to gain an understanding of the plasma chemistry of this monomer. The monomer primarily dissociated into CF 3 • and CHF 2 • in the plasma. The results from mass spectrometry indicated that CHF 2 * was the primary precursor for deposition and that the fluorine radicals in the plasma were primarily scavenged as CF 4 and HF. Monomer conversion ͑fraction of monomer fragmented͒ in the plasma was determined based on mass spectrometer partial pressure analysis of CH 3 CHF ϩ fragments ͑parent molecule: CF 3 CHF 2 ͒ before and after plasma ignition. The conversion correlated directly with both the applied power and the deposition rate. The overall gas phase reactions did not change significantly with rf power within our range of operation, indicating a common reaction mechanism at all powers. No significant change in the composition of the deposited films was found, as measured by x-ray photoelectron spectroscopy ͑XPS͒, supporting the common mechanism conclusion. Further, XPS studies showed a fluorine-to-carbon ratio between 1.05 and 1.15 suggesting extensive crosslinking of the polymer. Infrared spectra of the deposited films showed negligible CH x concentration despite the presence of hydrogen in the monomer.

Fluorine doping into diamond‐like carbon coatings inhibits protein adsorption and platelet activation

“…The C1s spectrum of the F‐DLC film could be deconvoluted into five Gaussian peaks corresponding to CF 3 (293.2 eV), CF 2 (290.95 eV), CF (288.8 eV), CCF x (286.5 eV), and CC (284.9 eV). The absolute binding energies of CF 3 , CF 2 , CF, CCF x , and CC are within previously reported ranges15–18 of 292.6–294, 290.3–292, 287.8–289.3, 285.5–287.3, and 283.4–285 eV, respectively. The ratio of fluorine to carbon atoms (F/C) can be calculated from the integrated intensity of the various components in the deconvoluted C1s spectrum19: where I bond is the photoemission intensity originating from a specific bond.…”

Scalable superhydrophobic coatings based on fluorinated diatomaceous earth: Abrasion resistance versus particle geometry

“…To correlate the fluorine content with the C F X=1-3 group concentrations [27,28] high-resolution C1s spectra were acquired and analyzed in Fig. 3.…”

Modified Bagasse Sheet with Functionalized Silanes for Removing of Engine Oil

“…The presence of new absorption bands at 1200 cm -1 (CFx stretch) confirms the presence of a fluorocarbon bond. Thus, the spectrum of the handsheet after treatment exhibits features of both an untreated and treated sheets (30) . …”

“…The contact angle θ is the angle formed by a liquid drop at the liquid, gas and solid three-phase boundary. It is included between the tangent plane to the surface of the liquid and the tangent plane to the surface of the solid, at the point of intersection (30) . The attempts to prepare hydrophobic paper sheet by n-octyl triethoxysilane and perfluoro octyltriethoxy silane were made from water ethanol mixtures for favoring the formation of hydrophobic domains.…”

“…A preweighed adsorbent paper (raw or modified) was placed in the beaker containing oil and a thin wire was used to immerse the paper into the oil up to 2 cm from the top of the paper. After a specified time (10,20,30,40,60, 80, 100 and 120 second), the sorbent was then removed from the beaker. The excess unabsorbed oil was drained for five minutes, and the sorbent was weighed.…”