2012
DOI: 10.1016/j.sna.2012.06.002
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Pore size dependence of PtSi/Porous Si Schottky barrier detectors on quantum efficiency response

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Cited by 12 publications
(7 citation statements)
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“…Various design schemes have been reported with the objective of improving the performances of photodetectors which include the quality junction formation by metal-insulator-metal [2], metalsemiconductor-metal (MSM) [5,6], tailoring the light reactive area of semiconductor materials [4][5][6][7], and employing the functional materials like nanowires, graphene [1], and silicide [8].…”
Section: Introductionmentioning
confidence: 99%
“…Various design schemes have been reported with the objective of improving the performances of photodetectors which include the quality junction formation by metal-insulator-metal [2], metalsemiconductor-metal (MSM) [5,6], tailoring the light reactive area of semiconductor materials [4][5][6][7], and employing the functional materials like nanowires, graphene [1], and silicide [8].…”
Section: Introductionmentioning
confidence: 99%
“…From the past two decades, these junctions have been studied extensively and it is in common usage for 3-5 µm detection spectral range at 77 K [4][5][6][7][8]. Moreover, some attempts have been applied to achieve room temperature operability of PtSi IR detection and improved its range up to 7 µm, using doping spike and porous silicon fix [9][10][11][12][13]. However, a few studies have performed electron transport mechanism in PtSi layer on a porosified substrate.…”
Section: Introductionmentioning
confidence: 99%
“…Another area of interest in detection is in 1-to 3-m wavelength to cover thermal mapping and optical communication application. From fabrication point of view, different methods, such as metal-assisted chemical etching (MaCE), which is compatible with complementary metal-oxide semiconductor (CMOS) process, have attracted scientists' interest in, for example, fabrication of 1-to 3-m wavelength single porousified detector in the recent years (Chartier et al, 2008;Zahedinejad et al, 2011;Mehrara et al, 2012). But producing an array of such detector imposes additional experimental problems in terms of patterning of porous silicon.…”
Section: Introductionmentioning
confidence: 99%
“…In this paper, we present the experimental results for fabricating a linear high-density array of PtSi/porous Si Schottky barriers using n-type silicon substrate. Also, we use gold or silver catalysts as mediators to facilitate silicon corrosion and formation of nanostructure with diverse profile from porous to Si nanowires (SiNWs) array, and a room temperature operation of such process guarantees lack of unwanted trap state in silicon band gap due to diffusion of catalysts (Mehrara et al, 2012).…”
Section: Introductionmentioning
confidence: 99%