Power law scaling during physical vapor deposition under extreme shadowing conditions

Mukherjee, Sudip; Gall, Daniel

doi:10.1063/1.3385389

Cited by 27 publications

(19 citation statements)

References 41 publications

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“…However, some experimental evidence by AFM and SEM analysis of the surface and morphology of thin films directly contradict this simple view [48,[219][220][221][222]. For example, in the case of evaporated OAD thin films, it has been found that well-defined correlation lengths and intercolumnar distances emerge depending on the deposition conditions.…”

Section: Correlation Distance and Bundling Associationmentioning

confidence: 87%

“…Similarly, through SEM analysis of the surface of a series of OAD thin films, Krause et al [222] identified repetitive correlation distances between surface voids separating the nanocolumns that were dependent on the deposition parameters. Using AFM, Mukherjee et al [220] were also able to determine the period of surface roughness features in different OAD thin film materials, and correlated the values obtained with specific growth exponents.…”

Section: Correlation Distance and Bundling Associationmentioning

confidence: 97%

“…Interesting morphological features, such as a correlation in lengths between nanocolumns or an increase in nanocolumnar diameter, have been related to the scaling parameter [219]. Furthermore, the influence of temperature on the power law has also been recently examined along with the relations between the exponent values and the growth process [220].…”

Section: Surface Roughness and Nanocolumn Widthmentioning

confidence: 99%

“…, where w is the width of the nanocolumn at a certain length, d, with respect to the substrate, and p 0 is the growth/scaling exponent [22,23,109,[216][217][218][219][220][221].…”

Section: Surface Roughness and Nanocolumn Widthmentioning

confidence: 99%

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Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

617

436

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a b s t r a c tThe oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.

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Section: Correlation Distance and Bundling Associationmentioning

confidence: 87%

Section: Correlation Distance and Bundling Associationmentioning

confidence: 97%

Section: Surface Roughness and Nanocolumn Widthmentioning

confidence: 99%

“…, where w is the width of the nanocolumn at a certain length, d, with respect to the substrate, and p 0 is the growth/scaling exponent [22,23,109,[216][217][218][219][220][221].…”

Section: Surface Roughness and Nanocolumn Widthmentioning

confidence: 99%

See 2 more Smart Citations

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

617

436

View full text Add to dashboard Cite

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“…In sputtering deposition process, individual atoms and clusters of atoms ejected from the Fe 2 O 3 target, reach a fl at substrate with multi ple direction and then condense on it, small nanoparticles with several tens of nanometers are formed on the substrate at the fi rst stage, and then nanocolumn structures are formed on the substrate along its normal direction (shown in Figure 5 a-i and Figure S7, Supporting Information) due to multiple-direction deposition and atomic shadow effect. [ 52,53 ] When a regular network-structured array with triangular prism is used as the template substrate for further sputtering deposition, the atoms condense initially on the hole bottoms, inner side of network structures, and the tops as well as side walls of the triangular prisms in the arrays, they agglomerate into small nanoparticles and then densely packed nanobranch structures grow on these surfaces along their normal directions, as illustrated in Figure 5 a-ii. With increase of deposition time, the materials deposited on the tops and walls of the triangular prisms become more and more, they gradually grew bigger, fi nally formed spherical nanoparticles, the gap between two neighboring nanoparticles could be reduced due to the confi ned central distance and the increased size of sphere-shaped particle with increasing deposition time.…”

Section: Formation Of Periodic Spherical Nanoparticle Arraysmentioning

confidence: 98%

Spherical Nanoparticle Arrays with Tunable Nanogaps and Their Hydrophobicity Enhanced Rapid SERS Detection by Localized Concentration of Droplet Evaporation

Zhang

Zhou

Liu

et al. 2015

Adv Materials Inter

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Their properties are usually dependent on morphologies and sizes, and hence the fabrication of controllable uniform micro/nanostructured arrays on a large-scale becomes more important. Conventional methods for obtaining periodical nanostructured arrays are lithographic techniques including laser lithography, [ 26,27 ] electron-beam lithography, [28][29][30] X-ray lithography, [ 31 ] atomic force microscope lithography, [ 32 ] scanning tunneling microscopy technology, [ 33 ] and so on. However, these techniques can not be afforded to most laboratories because of their high processing costs and lower production effi ciency. [ 34 ] In recent decades, with fast development of colloidal science and self-assembly technology, large-scaled monolayer colloidal crystals can be fabricated using highly monodispersed colloidal spheres. [ 35 ] Based on this achievement, another alternative method, colloidal lithography, has been well developed to fabricate multiform periodic micro/nanostructured arrays (i.e., nanoparticle arrays, nanobowl arrays, nanoring arrays, and nanopillar arrays) using these monolayer colloidal crystals as templates or masks [36][37][38][39] by chemical routes including solution-dipping strategy, wet chemical etching, and electrochemical deposition. [40][41][42][43] Such periodic micro/nanostructured array fi lms generally have special rough surfaces, which can be used as SERS-active substrates for detection and identification of organic molecules with trace concentrations. Although chemical routes based on colloidal templates possess advantages of the simple operation, low processing costs, it is still quite diffi cult to achieve micro/nanostructured arrays with very uniform morphology on large-scale by above routes. If these micro/ nanostructured arrays are applied as active substrates in SERS detection, the intensity of SERS spectra in different areas on the sample will fl uctuate in a large range, leading to the failure in practical applications. Whereas other parallel routes, based on physical process method, such as sputtering deposition, pulsed laser deposition, thermal evaporation deposition, atomic layer deposition, and so on, combining with monolayer colloidal crystals template can well resolve these problems. [ 44 ] SERS enhancement activities are mainly dependent on chemical enhancement or local electromagnetic fi eld enhancement at nanoscaled protrusions and cavities. For the latter case, the Periodic hexagonal spherical nanoparticle arrays are fabricated by a sacrificial colloidal monolayer template route by chemical deposition and further physical deposition. The regular network-structured arrays are fi rst templated by colloidal monolayers and then they are changed to novel periodic spherical nanoparticle arrays by further sputtering deposition due to multiple direction deposition and shadow effect between adjacent nanoparticles. The nanogaps between two adjacent spherical nanoparticles can be well tuned by controlling deposition time. Such periodic nanoparticle arrays with gold coatings ...

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Introduction: Glancing Angle Deposition Technology

Hawkeye

Taschuk

Brett

2014

Glancing Angle Deposition of Thin Films

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Power law scaling during physical vapor deposition under extreme shadowing conditions

Cited by 27 publications

References 41 publications

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Spherical Nanoparticle Arrays with Tunable Nanogaps and Their Hydrophobicity Enhanced Rapid SERS Detection by Localized Concentration of Droplet Evaporation

Introduction: Glancing Angle Deposition Technology

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