Preparation and characterization of nanocrystalline cubic boron nitride by microwave plasma-enhanced chemical vapor deposition

Abstract

Polycrystalline boron nitride films have been deposited using microwave plasma-enhanced chemical vapor deposition. IR absorption spectra of films deposited using NaBH4 as the boron source in NH3 and H2 gases showed absorptions which are nearly the same as the characteristic vibrational modes seen in cubic and pyrolytic boron nitrides. Films deposited at 5 Torr also showed electron diffraction patterns for pyrolytic boron nitride, turbostratic boron nitride and cubic boron nitride. At higher gas pressures, only rings consistent with the formation of amorphous and cubic boron nitride were observed. Although the Raman spectra from a film deposited at 60 Torr showed broad peaks at ∼1080 and ∼1310 cm−1, the positions of the Raman lines for cubic boron nitride, no x-ray diffraction lines could be observed except that of the silicon substrate.

Field emission properties of BN coated Si tips by pulsed ArF laser deposition

“…16,17,19 FTIR spectra of three films deposited in N 2 with and without substrate bias and nitrogen plasma are shown in Fig. 1.…”

Electron emission from boron nitride coated Si field emitters

“…[8][9][10][11][12][13] BN is well known as a material which has various phases such as hexagonal, cubic, and so on with growth methods and conditions. We characterized BN films synthesized by plasma-assisted chemical vapor deposition and found that the electron emission occurred from sulfur ͑S͒-doped BN films at a low electric field.…”

Raman studies on the effect of multiple-energy ion implantation on single-crystal hexagonal boron nitride

“…c-BN gained its fame around the mid-twentieth century after its synthesis by Wentorf (2), who synthesised it by the high pressure and high temperature method. Since then, various material scientists have been researching on ways to synthesise in nanoscale and as thin film (3)(4)(5). c-BN is an important material because of its superior properties such as super hardness (75 GPa), high thermal stability for temperatures up to 3000 K, high thermal conductivity of about 13 W/m K, wide indirect bandgap of 6.5 eV and low dielectric constant (6)(7)(8).…”