2002
DOI: 10.1117/12.474180
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Processing techniques for novel BARC chemistries

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Cited by 3 publications
(2 citation statements)
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“…The logic of harvest areas was not altogether dissimilar from that of the Hauberge in north-western Germany where forest regions were parcelled into fields that were used in rotation. 222 As explained by Sakari Kuusi, a similar rotation system (where members of different households took turns in harvesting different parts of the forests) did exist in Ostrobothnia during the middle of the eighteenth century. 223 However, a system of rotating harvest areas does not seem to have been practiced in North Ostrobothnia during the seventeenth century.…”
Section: Ancient Harvest Areasmentioning
confidence: 90%
“…The logic of harvest areas was not altogether dissimilar from that of the Hauberge in north-western Germany where forest regions were parcelled into fields that were used in rotation. 222 As explained by Sakari Kuusi, a similar rotation system (where members of different households took turns in harvesting different parts of the forests) did exist in Ostrobothnia during the middle of the eighteenth century. 223 However, a system of rotating harvest areas does not seem to have been practiced in North Ostrobothnia during the seventeenth century.…”
Section: Ancient Harvest Areasmentioning
confidence: 90%
“…The variation in linewidth for this thermally activated process ranges generally between 1 and 10 nm per 1°C change in bake temperature [2]. With linewidths decreasing below 100 nm, there is a need to minimize temperature variations and maximize process robustness for thermal processing of resists, otherwise a significant portion of the process error budget will be consumed [3][4][5][6][7][8][9]. Recently, chemically amplified photoresists (CARs) have been used in the manufacturing of advanced photomasks where critical dimension (CD) specifications have required the introduction of laser pattern generators that operate in the wavelength range of 248-257 nm [10].…”
Section: Introductionmentioning
confidence: 99%