Properties of Ti coatings deposited by high-power ion beams

Abstract

Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma pro duced by irradiating a Ti target with high power ion beams. The dependences of the adhesion, nanohardness, Young's modulus, and friction coefficient on the distance between the sputtered target and the substrate and on the thickness of the coating are studied for thin film titanium coatings. The formation of a transition layer with an alternating content of Ti is found to increase coating adhesion.