Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz

Wittpahl, V.; Ney, C.; Behnke, U.; Mertin, W.; Kubalek, E.

doi:10.1016/s0026-2714(99)00129-8

Cited by 5 publications

(2 citation statements)

References 4 publications

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“…where τ is the carrier life time. It is possible to chop the electron beam up to the gigahertz range [16] and the heterodyne mixing technique in SPM works in this range, too [17]. Therefore, the life time can be calculated from the measured cut-off frequency.…”

Section: Use Of Electron-beam-induced Potential For Materials Charact...mentioning

confidence: 99%

Electron-beam-induced potentials in semiconductors: calculation and measurement with an SEM/SPM hybrid system

Thomas¹,

Joachimsthaler²,

Heiderhoff³

et al. 2004

J. Phys. D: Appl. Phys.

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In this work electron-beam-induced potentials are analysed theoretically and experimentally for semiconductors. A theoretical model is developed to describe the surface potential distribution produced by an electron beam. The distribution of generated carriers is calculated using semiconductor equations. This distribution causes a local change in surface potential, which is derived with the help of quasi-Fermi energies. The potential distribution is simulated using the model developed and measured with a scanning probe microscope (SPM) built inside a scanning electron microscope (SEM), for different samples, for different beam excitations and for different cantilever voltages of SPM. In the end, some fields of application are shown where material properties can be determined using an SEM/SPM hybrid system.

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Section: Use Of Electron-beam-induced Potential For Materials Charact...mentioning

confidence: 99%

Electron-beam-induced potentials in semiconductors: calculation and measurement with an SEM/SPM hybrid system

Thomas¹,

Joachimsthaler²,

Heiderhoff³

et al. 2004

J. Phys. D: Appl. Phys.

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“…The sensitivity of the EFM mode at low pressures and in high vacuum is high enough (due to the high-Q factor) to detect a potential distribution on a homogeneous gold sample as induced by a modulated electron beam. To avoid artefacts, like thermal stimulations of the cantilever at the electron modulation frequency, the heterodyne mixing technique, well known from high-frequency electric force microscopy [25], is used. Measurements obtained in beam-scanning mode and high-vacuum condition depending on tip-sample distances are illustrated in figure 10.…”

Section: Electron-beam-induced Potentialsmentioning

confidence: 99%

A universal scanning-probe-microscope-based hybrid system

Joachimsthaler¹,

Heiderhoff²,

Balk³

2002

Meas. Sci. Technol.

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A modularly equipped scanning probe microscope (SPM)-based hybrid system is developed, expanding application fields and performances of former instruments. The SPM head can easily be incorporated into the analysis chamber of most scanning electron microscopes (SEMs) and both systems can be handled by the electronics within one software simultaneously. Contact and non-contact scanning force microscope (SFM) measurements obtained inside an environmental SEM for the first time demonstrate resolutions of less than 0.2 nm under working conditions.Both probes can be used simultaneously either as actuators or sensors to deliberately modify and analyse sample properties as well as to characterize the probe interactions. This is the essential advantage of hybrid systems, besides the great number of well known complementary analyses which can be performed with each microscope at the same sample area. The use of an electron beam and a SFM tip as two independent electrical actuators and sensors is demonstrated to be exemplary. Interaction of the probes with each other is a new aspect, which is presented and discussed.

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Measurement of magnetic near field on a coplanar waveguide using a MFM tip

Endo

Watanabe

Mitsuzuka

et al. 2011

Journal of Applied Physics

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This paper proposes a method to measure the ac magnetic field distribution in close proximity to a coplanar waveguide (CPW) employing a cantilever tip fabricated for magnetic force microscopy as a sensor. Almost the entire surface of the tip is coated with a magnetically hard film (Co–Cr–Pt), which is magnetized vertically. Herein we focus on the accuracy of the tip image distribution in close proximity of the ac fields from downsized CPWs which, for example, have a signal line as fine as 5 μm and ground lines of 50 μm. The results suggest that the system has potential as a micron scale RF field detector, although a few technological problems must be solved.

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Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz

Cited by 5 publications

References 4 publications

Electron-beam-induced potentials in semiconductors: calculation and measurement with an SEM/SPM hybrid system

Electron-beam-induced potentials in semiconductors: calculation and measurement with an SEM/SPM hybrid system

A universal scanning-probe-microscope-based hybrid system

Measurement of magnetic near field on a coplanar waveguide using a MFM tip

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