2014
DOI: 10.1016/j.apsusc.2014.01.063
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Recent advances on dielectrics technology for SiC and GaN power devices

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Cited by 144 publications
(53 citation statements)
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“…These wide band-gap semiconductor devices, such as SiC power devices, provide great opportunities to develop power electronic systems with increased power densities, high reliability in extreme environments and higher integration density [1][2][3][4][5]. However, one big challenge is how to solve assembly and materials problems coupled with packaging of SiC devices.…”
Section: Introductionmentioning
confidence: 99%
“…These wide band-gap semiconductor devices, such as SiC power devices, provide great opportunities to develop power electronic systems with increased power densities, high reliability in extreme environments and higher integration density [1][2][3][4][5]. However, one big challenge is how to solve assembly and materials problems coupled with packaging of SiC devices.…”
Section: Introductionmentioning
confidence: 99%
“…GaN technology based HEMT devices operating at 200 − 600 V are already commercially available. However, GaN HEMTs still have not reached its full potential with remaining unresolved fundamental questions needed to be addressed in research community [25][26][27][28].…”
Section: Algan/gan High Electron Mobility Transistor Structuresmentioning
confidence: 99%
“…Surface donor-like states in the AlGaN are generally believed to be source of electrons [28]. [32,33].…”
Section: Algan/gan High Electron Mobility Transistor Structuresmentioning
confidence: 99%
“…There are various reports evaluating the properties of dielectrics for GaN, some reported the interface state density between GaN and SiO 2 is 3 orders higher than GaN and SiNx [34], while others reported converse. Since, GaN do not have native oxide; despite of uncertainty in the dielectric layer, SiN x and SiO 2 are prevalently used to passivate the surface.…”
Section: Resultsmentioning
confidence: 99%
“…However, most of them seem to have performance lower than the theoretical maximum due to various factors such as quality of the GaN films, device design [33], fabrication process and others [34].…”
Section: Motivationmentioning
confidence: 99%