“…In order to attain high signal to noise ratio in perpendicular magnetic recording media, a soft magnetic underlayer, called ''SUL'', is required to suppress the magnetic fluctuation of magnetization in the recording layer. The magnetic properties required for SUL are large saturation magnetization 4pM s and high in-plane magnetic anisotropy field H k [1]. FeCoB/NiFe/Si thin film is one of the hopeful candidates which possess the properties mentioned above.…”