Sensitive Detection of Local Elasticity by Oscillating an AFM Cantilever with Its Mass Concentrated.

Muraoka, Mikio

doi:10.1299/jsmea.45.567

Cited by 12 publications

(20 citation statements)

References 5 publications

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“…Figure 1 shows a scanning electron micrograph of the CM cantilever. The main difference from the previous works [ 11 , 12 ] was in the use of the micro-machined particle instead of a deoxidized random particle for the concentrated mass. Another difference was in the process that a flat tip was formed from a virgin tip, not from a tip wasted after several tens of scans for imaging.…”

Section: Experimental Procedures and Theorymentioning

confidence: 97%

“…The experimental procedure is described elsewhere in detail [ 11 , 12 ]. We will briefly explain it here.…”

Section: Experimental Procedures and Theorymentioning

confidence: 99%

“…We previously proposed a concentrated-mass (CM) cantilever as a way of enhancing the sensitivity in k *-detection without trade-offs [11]. A CM cantilever assures the maximum sensitivity for any sample material.…”

Section: Introductionmentioning

confidence: 99%

“…When attempting to analyze difficult samples like a DLC film with thickness less than 10 nm, higher performance of AFAM is required on the detection of k * and the spatial resolution. We previously proposed a concentrated-mass (CM) cantilever as a way of enhancing the sensitivity in k *-detection without trade-offs [ 11 ]. A CM cantilever assures the maximum sensitivity for any sample material.…”

Section: Introductionmentioning

confidence: 99%

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Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

Muraoka

Komatsu

2010

Nanoscale Res Lett

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We present a method for characterizing ultrathin films using sensitivity-enhanced atomic force acoustic microscopy, where a concentrated-mass cantilever having a flat tip was used as a sensitive oscillator. Evaluation was aimed at 6-nm-thick and 10-nm-thick diamond-like carbon (DLC) films deposited, using different methods, on a hard disk for the effective Young's modulus defined as E/(1 - ν2), where E is the Young's modulus, and ν is the Poisson's ratio. The resonant frequency of the cantilever was affected not only by the film's elasticity but also by the substrate even at an indentation depth of about 0.6 nm. The substrate effect was removed by employing a theoretical formula on the indentation of a layered half-space, together with a hard disk without DLC coating. The moduli of the 6-nm-thick and 10-nm-thick DLC films were 392 and 345 GPa, respectively. The error analysis showed the standard deviation less than 5% in the moduli.

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Section: Experimental Procedures and Theorymentioning

confidence: 97%

“…The experimental procedure is described elsewhere in detail [ 11 , 12 ]. We will briefly explain it here.…”

Section: Experimental Procedures and Theorymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

Muraoka

Komatsu

2010

Nanoscale Res Lett

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“…According to the analysis of cantilever vibration with the tip contacting the sample, resonance frequency sensitivity may decrease rapidly when a large contact stiffness presents [19][20][21][22]. That is, the shift of CR frequency to the change of local mechanical properties is usually not so obvious under the condition of a high sample modulus or contact stiffness.…”

Section: Introductionmentioning

confidence: 99%

Enhancement of contact resonance atomic force microscopy subsurface imaging by mass-attached cantilevers

Wang

Zhang

Chen

2020

J. Phys. D: Appl. Phys.

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Improvement of contact resonance atomic force microscopy (CR-AFM) frequency sensitivity at a high contact stiffness condition and subsequent enhancement of its subsurface imaging capability were demonstrated by adding an additional mass on the cantilever backside near the free end. The influence of mass and its position on the CR-AFM performances was analytically investigated by using a simplified cantilever vibration model and further compared with finite element analysis. Theoretical results and FEA simulations showed good agreement and they could provide a general guide on the cantilever’s modification by attaching a proper mass to improve the CR-AFM capability. As a prototype, a Pt micro-disc with precisely controlled size and position on the cantilever, which served as the attached mass, was deposited by utilizing focused ion beam. The improvement of frequency sensitivity was verified through CR spectroscopy and subsurface imaging on cavities having pre-determined diameters and covered with highly oriented pyrolytic graphite flakes. Compared with the original unmodified cantilever, obvious enhancement of CR-AFM subsurface nano-imaging was obtained. The mass-attached cantilever can benefit characterizing sample’s mechanical properties and enhancing subsurface imaging based on tip-generated stress.

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Atomic Force Acoustic Microscopy

Rabe

2006

Applied Scanning Probe Methods II

119

161

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Sensitive Detection of Local Elasticity by Oscillating an AFM Cantilever with Its Mass Concentrated.

Cited by 12 publications

References 5 publications

Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

Enhancement of contact resonance atomic force microscopy subsurface imaging by mass-attached cantilevers

Atomic Force Acoustic Microscopy

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