We demonstrate monolithic 3D integration of logic and memory in arbitrary vertical stacking order with the ability to use conventional inter-layer vias to connect between any layers of the 3D IC. We experimentally show 4 vertically-stacked layers (logic layer followed by two memory layers followed by another logic layer), enabled by the integration of traditional silicon-FETs (on the bottom-most layer) with low-processing-temperature emerging nanotechnologies: metal-oxide resistive random-access memory (RRAM), and carbon nanotube-FETs (CNFETs). As a demonstration, we show a routing element of a switchbox for a field-programmable gate array (FPGA), with each component of the routing element (involving both logic and memory elements) on their own vertical layer.
Introduction
Monolithic Three-Dimensional IntegrationThree-dimensional (3D) integration is a promising technology option for improving the performance, energy efficiency, and footprint of electronic systems [1]. Today's 2.5D and 3D integration are achieved through chip-stacking, with multiple vertical circuit layers connected using Through-Silicon Vias (TSVs). Monolithic 3D integration, whereby each circuit layer is thin and is fabricated directly over the previous circuit layers on the same substrate, can use conventional inter-layer vias (ILVs) to connect between various layers. The use of conventional vias rather than TSVs allows for massive vertical interconnect density, potentially maximizing the benefits of 3D integrated circuits (ICs) [1]. Moreover, monolithic 3D integration of logic and memory can enable new architectures and potentially alleviate the logic-memory communication bottleneck [2,3].