2020
DOI: 10.48550/arxiv.2007.14383
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Shadow-wall lithography of ballistic superconductor-semiconductor quantum devices

Sebastian Heedt,
Marina Quintero-Pérez,
Francesco Borsoi
et al.

Abstract: Chips that contain devices with a global back-gate like the ones presented in Figs. 2 and 3 of the main text are fabricated on p + -doped Si wafers covered with 285 nm of thermal SiO 2 . The first fabrication step consists of patterning the bond pads via electron-beam lithography (EBL), W sputtering and lift-off in acetone. Afterwards, plasma-enhanced chemical vapour deposition (PECVD) of 600 nm of Si 3 N 4 is performed followed by EBL, reactive-ion etching (RIE) with CHF 3 /O 2 gases, resist lift-off and an o… Show more

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Cited by 6 publications
(14 citation statements)
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“…Figure 1b shows the differential resistance dV /dI of JJ Devices 1 and 3 as a function of the perpendicular out-of-plane magnetic field B z sweeping I from negative to positive. A zero-resistance superconducting region is observed at low currents and the switching current where the device switches to a finite resistance state decreases monotonously with B z and at B c z ∼ 150 mT superconductivity is completely suppressed consistent with previous measurements of epitaxial hybrid nanowires in a perpendicular field [17,21]. A strikingly different behavior is observed in the corresponding measurement performed with the field B applied parallel to the NW (Fig.…”
Section: Resultssupporting
confidence: 88%
See 2 more Smart Citations
“…Figure 1b shows the differential resistance dV /dI of JJ Devices 1 and 3 as a function of the perpendicular out-of-plane magnetic field B z sweeping I from negative to positive. A zero-resistance superconducting region is observed at low currents and the switching current where the device switches to a finite resistance state decreases monotonously with B z and at B c z ∼ 150 mT superconductivity is completely suppressed consistent with previous measurements of epitaxial hybrid nanowires in a perpendicular field [17,21]. A strikingly different behavior is observed in the corresponding measurement performed with the field B applied parallel to the NW (Fig.…”
Section: Resultssupporting
confidence: 88%
“…The extracted gap is ∆ = 225 µeV consistent with the expected gap of the Al hybrids [17]. In addition to the MAR features, spectroscopic measurements also probe sub-gap states in the leads [21] and Fig. 3c shows a measurement of the spectrum as a function of B for a fixed V BG = −30 V. A rich spectrum emerges at finite B which is originating from the 2∆ peak and is following a pattern modulating similar to the switching current in Figs.…”
Section: (A) (Red Trace)supporting
confidence: 73%
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“…In most cases, to identify non-Majorana states it is sufficient to analyze two-terminal measurements on just one nanowire in a self-consistent fashion. However, positive identification of MZM will likely require threeterminal measurements on both nanowire ends [25,[27][28][29][30][31]. More generally, the three-terminal technique is a powerful method of studying the localization of any wavefunctions, which is what we do in this work.…”
mentioning
confidence: 92%
“…[11][12][13][14][15][16] Shadow deposition of superconductors has furthermore successfully been used, to avoid etching damage and the need of developing etching procedures. [17][18][19][20] The downside of these out-of-plane synthesized wires is the limited geometric flexibility in creating networks.…”
mentioning
confidence: 99%