2021
DOI: 10.1063/5.0063592
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Si-based light emitters synthesized with Ge+ ion bombardment

Abstract: The photoluminescence (PL) of Ge/Si nanostructures synthesized by using Ge+ ion bombardment is studied. The structure represents a Si substrate with GeSi nanoclusters created by 80 keV Ge implantation with a fluence of ∼1015 ions/cm2 and subsequent thermal annealing. The PL measurements confirm the advantage of Ge/Si structures synthesized using Ge+ ion bombardment over the usual epitaxial structures with GeSi quantum dots. The presence of defects produced by Ge implantation results in pronounced PL at telecom… Show more

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Cited by 8 publications
(3 citation statements)
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“…However, for the application at hand scalable manufacturing and integration with semiconductor and superconductor electronics are crucial considerations, and III-V light emitters have a long history of difficulty integrating with silicon. The quantum dot model is also applicable to group IV, Ge-based quantum dots [85], which may prove adequate for the present appli-…”
Section: E Rate Equations For the Transmitter Light Sourcementioning
confidence: 99%
“…However, for the application at hand scalable manufacturing and integration with semiconductor and superconductor electronics are crucial considerations, and III-V light emitters have a long history of difficulty integrating with silicon. The quantum dot model is also applicable to group IV, Ge-based quantum dots [85], which may prove adequate for the present appli-…”
Section: E Rate Equations For the Transmitter Light Sourcementioning
confidence: 99%
“…The additional ion implantation raised the concentration of oxide precipitates and altered the defect structure of samples subjected to low-temperature annealing, while the use of a chlorinecontaining atmosphere helped modify the defect structure and allowed for gettering of nonradiative recombination centers. The results reported in [15,16] are worth noting. In these studies, the addition of preliminary implantation of Ge + ions helped increase considerably the luminescence intensity in silicon structures with GeSi quantum dots, which were formed in the process of epitaxial growth.…”
Section: Introductionmentioning
confidence: 88%
“…Дополнительная имплантация ионов увеличивала концентрацию окисных преципитатов и изменяла дефектную структуру образцов, прошедших низкотемпературные отжиги, а использование хлорсодержащей атмосферы модифицировало дефектную структуру и позволяло геттерировать центры безызлучательной рекомбинации. Интересно отметить результаты работ [15,16], в которых добавление предварительной имплантации ионов Ge + позволило существенно увеличить интенсивность люминесценции в структурах кремния с GeSi квантовыми точками, которые формировались в процессе эпитаксиального роста. Цель настоящей работы заключалась в разработке технологии, основанной на комбинации методов ионной имплантации и формировании кислородных преципитатов, для создания и исследования свойств СД с ДЛ.…”
Section: Introductionunclassified