“…The presence of this layer, which is most of the time voluntarily deposited to improve interface quality, 2,3) modifies the electrical characteristics of a device owing to the large difference in material properties (e.g., band offset, effective mass, and constant dielectric) between the highlayer and the interfacial dielectric. [9][10][11][12] Quantum-mechanical effects, such as tunneling transmission probability, markedly affect the transport of electrons through multi layer gate stacks and thus leakage current must be carefully modeled to predict the performance of the above devices. 13,14) In this context, we present a detailed study of the gate leakage current in MIM capacitors with different high-dielectrics and thicknesses, using and comparing the well-known Wentzel-Kramers-Brillouin (WKB) approximation 15,16) and a full quantum-mechanical approach, namely, the nonequilibrium Green's function (NEGF) formalism.…”