Soft thermal nanoimprint with a 10 nm feature size

Pandey, Ashish; Tzadka, Sivan; Yehuda, Dor; Schvartzman, Mark

doi:10.1039/c8sm02590h

Cited by 43 publications

(31 citation statements)

References 54 publications

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“…The main limitation with optical lithography is the requirement that the starting layer on which the features will be built must be a stiff flat surface, which precludes fabrication of 3D structures. Prefabricated structured rigid molds can be used in pattern transfer methods to print the mold features to other materials with high efficiency and fidelity (Guo, 2004;Pandey et al, 2019). The most common techniques are nanoimprinting and replica molding (Chen et al, 2015).…”

Section: Mimicking Ecm Topographymentioning

confidence: 99%

Mechanical and Physical Regulation of Fibroblast–Myofibroblast Transition: From Cellular Mechanoresponse to Tissue Pathology

D’Urso

Kurniawan

2020

Front. Bioeng. Biotechnol.

166

129

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Fibroblasts are cells present throughout the human body that are primarily responsible for the production and maintenance of the extracellular matrix (ECM) within the tissues. They have the capability to modify the mechanical properties of the ECM within the tissue and transition into myofibroblasts, a cell type that is associated with the development of fibrotic tissue through an acute increase of cell density and protein deposition. This transition from fibroblast to myofibroblast—a well-known cellular hallmark of the pathological state of tissues—and the environmental stimuli that can induce this transition have received a lot of attention, for example in the contexts of asthma and cardiac fibrosis. Recent efforts in understanding how cells sense their physical environment at the micro- and nano-scales have ushered in a new appreciation that the substrates on which the cells adhere provide not only passive influence, but also active stimulus that can affect fibroblast activation. These studies suggest that mechanical interactions at the cell–substrate interface play a key role in regulating this phenotype transition by changing the mechanical and morphological properties of the cells. Here, we briefly summarize the reported chemical and physical cues regulating fibroblast phenotype. We then argue that a better understanding of how cells mechanically interact with the substrate (mechanosensing) and how this influences cell behaviors (mechanotransduction) using well-defined platforms that decouple the physical stimuli from the chemical ones can provide a powerful tool to control the balance between physiological tissue regeneration and pathological fibrotic response.

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Section: Mimicking Ecm Topographymentioning

confidence: 99%

Mechanical and Physical Regulation of Fibroblast–Myofibroblast Transition: From Cellular Mechanoresponse to Tissue Pathology

D’Urso

Kurniawan

2020

Front. Bioeng. Biotechnol.

166

129

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“…Among the top-down lithography methods, ≈10 nm scale patterns can be produced by extreme ultraviolet (EUV) lithography, [16][17][18][19][20][21][22][23][24][25][26] charged particle-based lithography, [27][28][29][30][31][32][33][34][35][36][37][38][39][40][41] tip-based lithography, [42][43][44][45][46][47][48][49][50][51][52][53][54][55] and nanoimprint lithography. [56][57][58][59][60][61][62][63][64][65][66] Thes...…”

Section: Introductionmentioning

confidence: 99%

Recent Progress in Simple and Cost‐Effective Top‐Down Lithography for ≈10 nm Scale Nanopatterns: From Edge Lithography to Secondary Sputtering Lithography

et al. 2020

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The development of a simple and cost‐effective method for fabricating ≈10 nm scale nanopatterns over large areas is an important issue, owing to the performance enhancement such patterning brings to various applications including sensors, semiconductors, and flexible transparent electrodes. Although nanoimprinting, extreme ultraviolet, electron beams, and scanning probe litho‐graphy are candidates for developing such nanopatterns, they are limited to complicated procedures with low throughput and high startup cost, which are difficult to use in various academic and industry fields. Recently, several easy and cost‐effective lithographic approaches have been reported to produce ≈10 nm scale patterns without defects over large areas. This includes a method of reducing the size using the narrow edge of a pattern, which has been attracting attention for the past several decades. More recently, secondary sputtering lithography using an ion‐bombardment technique was reported as a new method to create high‐resolution and high‐aspect‐ratio structures. Recent progress in simple and cost‐effective top‐down lithography for ≈10 nm scale nanopatterns via edge and secondary sputtering techniques is reviewed. The principles, technical advances, and applications are demonstrated. Finally, the future direction of edge and secondary sputtering lithography research toward issues to be resolved to broaden applications is discussed.

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“…Direct imprint of bulk chalcogenide glasses without applying an external pressure does not deform the bulk substrate; however, it results in an incomplete pattern transfer from the mold to the glass surface . Recently, direct imprint of chalcogenide glass was also demonstrated by confining the substrate within a tight metallic fixture that prevents substrate deformation . Yet, the flatness of the imprinted substrate was not quantified in these reports.…”

Section: Calculated and Measured Angles For Reflection Diffraction Grmentioning

confidence: 99%

“…Due to the mechanical flexibility of soft molds, soft imprint can produce high‐resolution nanostructures in UV curable polymer films deposited on substrates with unconventional geometry, such as lenses and optical fibers . Furthermore, our group has recently demonstrated thermal nanoimprint of polymer films on both flat surfaces and lenses . There, the imprint temperature was chosen to be sufficiently above the glass transition point of the imprinted polymer to ensure its viscous flow, yet still below the temperature at which the mold can be damaged.…”

Section: Calculated and Measured Angles For Reflection Diffraction Grmentioning

confidence: 99%

Direct Imprint of Optical Functionalities on Free‐Form Chalcogenide Glasses

Ostrovsky

Yehuda

Tzadka

et al. 2019

Advanced Optical Materials

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Scalable surface patterning of chalcogenide glasses is the crux for many optical applications of these promising optical materials. Here, a novel, resist‐free surface patterning of chalcogenide glasses with 3D relief microstructures is introduced, using direct radiation‐assisted thermal imprint. The imprint is based on a nanocomposite mold made of a carbon nanotube matrix and polydimethylsiloxane resin. To allow nanoimprint, the mold and glass substrate are confined between two elastic membranes, pneumatically pressed against each other, and controllably radiated by an infrared bulb. Since chalcogenide glass is transparent to infrared radiation, the radiation is mostly absorbed in the mold due to the embedded carbon nanotubes, so that the glass–mold interface is heated to the imprint temperature. By using this approach, the first of its type direct imprint of chalcogenide glass of any arbitrary form is demonstrated, including flat substrates and convex aspheric lenses. The composition and structure of imprinted chalcogenide glass are analyzed, and it is demonstrated that they are well maintained throughout the imprint. It is optically characterized both in transmission and reflection modes. It is believed that the innovation provides a quantum leap in the micro‐ and nano‐scale processing of chalcogenide glasses, and opens the pathway to their numerous applications.

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Soft thermal nanoimprint with a 10 nm feature size

Abstract: We explore the miniaturization edge of soft nanoimprint molds, and demonstrate their feasibility to ultra-high resolution patterning of polymer films on planar and curved substrates, as well as of chalcogenide glasses.

Cited by 43 publications

References 54 publications

Mechanical and Physical Regulation of Fibroblast–Myofibroblast Transition: From Cellular Mechanoresponse to Tissue Pathology

Mechanical and Physical Regulation of Fibroblast–Myofibroblast Transition: From Cellular Mechanoresponse to Tissue Pathology

Recent Progress in Simple and Cost‐Effective Top‐Down Lithography for ≈10 nm Scale Nanopatterns: From Edge Lithography to Secondary Sputtering Lithography

Direct Imprint of Optical Functionalities on Free‐Form Chalcogenide Glasses

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