2015
DOI: 10.1016/j.egypro.2015.07.077
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Solar Cells with Epitaxial or Gas Phase Diffused Emitters Above 21% Efficiency

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Cited by 10 publications
(5 citation statements)
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“…The throughput of emitter formation can be increased in the case of batch processing with a gas dopant source (e.g., POCl 3 ) by depositing at lower pressure. 47 This process can also be completely replaced by ion implantation 48,49 or chemical vapor deposition (CVD) either of a dopant source, 50 a doped epitaxial silicon layer, 51 or a polysilicon layer. 52 CVD and implant emitter formation also obviate the need for edge isolation because they are single-sided processes.…”
Section: Papermentioning
confidence: 99%
“…The throughput of emitter formation can be increased in the case of batch processing with a gas dopant source (e.g., POCl 3 ) by depositing at lower pressure. 47 This process can also be completely replaced by ion implantation 48,49 or chemical vapor deposition (CVD) either of a dopant source, 50 a doped epitaxial silicon layer, 51 or a polysilicon layer. 52 CVD and implant emitter formation also obviate the need for edge isolation because they are single-sided processes.…”
Section: Papermentioning
confidence: 99%
“…They also showed that they can selectively grow the epitaxial layer. Rachow et al produced a 21% efficient PERL solar cell by using phosphorus doped epitaxial emitter grown by APCVD [7]. This proves that epitaxially grown emitters can potentially replace diffused emitters in high performance IBC solar cells to simplify the process flow and hence reduce costs.…”
Section: Introductionmentioning
confidence: 98%
“…For PassDop contacts, already the dielectric passivation is opened with the laser process and the Al layer is deposited afterwards. For further information about LFC [12] and PassDop contacts [13], [14], the reader is referred to Si literature. In both cases, the laser process leads to a highly p-type (p + ) doped region under each contact point, realized by Al atoms for LFC contacts and by Boron atoms for PassDop contacts.…”
Section: Introductionmentioning
confidence: 99%